The Keysight 10897D is a high-resolution VMEbus laser axis board delivering precision displacement measurement and control for single-axis applications. Engineered for semiconductor fabrication and advanced manufacturing, it combines sub-nanometer resolution with programmable signal routing and multi-board synchronization. The board reduces data age uncertainty to less than 1 nanosecond, critical for dynamic positioning systems requiring superior accuracy.
Technical Specifications
Measurement & Resolution
• Single measurement channel per board; up to seven boards per system
• Data format: 36-bit 2’s complement
• Linear optics resolution: 1.2 nm (λ/512)
• Plane mirror optics resolution: 0.6 nm (λ/1024)
• High resolution optics: 0.3 nm (λ/2048)
Velocity Performance (Plane Mirror Optics)
• Keysight 5517GL, 5517DL: ±0.670 m/s
• Keysight 5517FL: ±0.700 m/s
• Keysight 5517EL: ±0.790 m/s
• Keysight 5517D: ±0.500 m/s
• Keysight 5517C: ±0.356 m/s
• System velocity limit: ±790 m/s (general); ±1100 m/s with Keysight E1709A receiver
Timing & Data Rates
• Position update rate: 10 MHz
• Direct hardware output data rate: 10,000 kHz maximum
• Bus data rate: 100 kHz maximum
• Multi-board synchronization: ±2 ns
• Data age uncertainty: Less than 1 ns
Signal Conditioning
• Programmable onboard low-pass filter for noise rejection in low signal-to-noise environments
– Key Features
• VMEbus (Revision C.1) compliant, 6U form factor
• Programmable signal routing from front panel, P2 connector, or multi-axis interconnect cable
• Supports multiple laser head and receiver cable options for system flexibility
– Typical Applications
• Semiconductor fabrication, inspection, and repair
• E-beam lithography machines
• Step-and-scan IC fabrication tools
• High-bandwidth closed-loop positioning systems
• Dynamic measurement in moving systems
– Compatibility & Integration
Compatible receiver cables: Keysight 10880A/B/C, N1250A/B/E. Compatible laser head cables: Keysight 10881A/B/C/D/E/F.
