The Agilent/Keysight 4062 is a semiconductor parametric test system engineered for process monitoring and device characterization in integrated circuit manufacturing. This platform delivers high-precision DC measurements across current, voltage, capacitance, conductance, and pulse force parameters, supported by an intelligent switching matrix capable of accessing up to 96 measurement pins. The system executes spot, sweep, pulse, pulse sweep, and analog search measurement modes with frequency capability to 500 kHz and precision to 0.05%.
Technical Specifications
• Measurement Parameters: DC current, DC voltage, capacitance, conductance, pulse force
• DC Measurement Modes: Spot, sweep, pulse, pulse sweep, analog search
• Frequency Range: Up to 500 kHz
• Measurement Precision: Up to 0.05%
• Source/Monitor Unit (SMU) Current Range: ±20 fA to ±1 A (standard); 2 pA to ±1 A (Kelvin configuration)
• Source/Monitor Unit (SMU) Voltage Range: ±40 µV to ±200 V (standard); ±40 µV to ±200 V (Kelvin configuration)
• Voltage/Voltage-Measurement Unit (VS/VMU) Output Range: ±1 mV to ±40 V
• VS/VMU Measurement Range: ±40 µV to ±40 V; ±4 µV to ±2 V (differential mode)
• Switching Matrix: Up to 96 measurement pins with 17 instrument ports (all ports access all pins)
• Source/Monitor Units: 1 high-resolution SMU, 1 high-current SMU (Kelvin), 2 Kelvin SMUs, 1 ground unit (Kelvin)
• Auxiliary Voltage Ports: 4 ports
• Connect-Force-Measure Sequence: Typical resistance measurement completes in less than 17 ms
– Key Features
• HP BASIC/UX operating environment with HP-UX (System V UNIX) platform
• Interactive Measurement and Analysis (IMA) Software with softpanel interface for interactive parametric testing
• SPECS and SPECS-FA software compatibility
• Configurable pin card options (48 or 96 pins via HP 4085A/B or HP 4089A switching matrices)
• Data acquisition across multiple test points with flexible instrument port allocation
– Typical Applications
• Process monitoring in semiconductor manufacturing
• Device characterization and parametric testing
• Integrated circuit development and yield optimization
– Compatibility & Integration
Available in HP 4062C, HP 4062UX, and HP 4062F configurations. Supports standard networking for remote operation. Compatible with auxiliary instrumentation such as LCR meters (e.g., HP 4284A, 20 Hz–1 MHz).
