The Agilent/Keysight N9200-61010 mainframe is an 8-slot chassis designed to host up to eight plug-in Source Measure Unit (SMU) modules for precision I-V characterization of semiconductors, components, and materials. This scalable platform combines high-speed measurement capability with configurable sourcing and compliance functions, delivering femtoampere-level current resolution and sub-microvolt voltage sensitivity. GPIB connectivity enables integration into automated parametric test systems, while the onboard high-speed ADC supports true parallel measurements and pulse testing from 500 µs to 2 s pulse widths.
Technical Specifications
• Mainframe: 8-slot high-speed measurement chassis
• SMU Module Capacity: Up to eight single-slot or equivalent multi-slot combinations
• Operating Range: ±200 mA / ±200 V
• Current Measurement Resolution: As low as 0.1 fA; capable of 5 pA measurements
• Voltage Measurement Resolution: 0.5 µV minimum
• Current Sourcing: Up to 1 A
• Voltage Sourcing: Up to 200 V
• Voltage Compliance: 0 V to ±200 V
• Current Compliance: ±100 pA to ±1 A
• Pulse Measurement: Pulse width 500 µs to 2 s; pulse period 5 ms to 5 s
• Ground Unit Output: 0 V ±100 µV; sink capacity 4 A
• Maximum Module Power Consumption: 80 W
• Warm-up Time: 40 minutes for rated accuracy
• Calibration Interval: 1 year
– Key Features
• High-speed ADC for accelerated test throughput and parallel measurement capability
• Modular architecture supporting HPSMU, MPSMU, HRSMU, and ASU module types
• Integrated ground unit with ultra-low output offset
• Voltage and current compliance protection for device safety
• Kelvin connection support for low-resistance measurement accuracy
– Typical Applications
• Semiconductor device characterization and parameter extraction
• Material conductivity and resistivity analysis
• Component reliability and stress testing
• Leakage current measurement in microelectronic devices
– Compatibility & Integration
• Interface: GPIB for remote control and automated test integration
• Software: EasyEXPERT group+ for device characterization workflows
• Measurement Reference: Specifications referenced to Zero Check terminal with 128-sample averaging at 1 PLC and filter ON
