The Keysight NX5402A is a Silicon Photonics Wafer Test System designed for automated, high-volume production testing of photonic integrated circuits. It combines 12 optical input channels, 12 optical output channels, and 6 to 30 electrical channels within a fully automated wafer prober environment, delivering integrated Wafer Acceptance Testing (WAT) and Process Control Monitoring (PCM) in a single platform.
Technical Specifications
Optical Architecture
• Tunable laser source: 1260 nm to 1360 nm (O-band) and 1450 nm to 1640 nm (C-band)
• Optical coupling via grating coupler
• 12 input and 12 output optical channels
• Source/Measure Units: 3 to 6
Electrical Capabilities
• Electrical measurement pins: Up to 30 channels
• Source/Measure Units: 3 to 6
Measurement Types
• Optical-to-Optical (O/O): Insertion Loss (IL) and Polarization Dependent Loss (PDL)
• Electrical-to-Electrical (E/E): IV measurement for photodiode
• Optical-to-Electrical (O/E): Responsivity measurement for photodiode
• Optical-to-Optical with Electrical (O/O with E): IL, PDL, and Vπ measurement for modulator
– Key Features
• Multi-channel optical/electrical test architecture optimized for high throughput
• Fully automated wafer prober integration
• Advanced Wafer-Level Photonic Calibration for guaranteed system performance
• Built-in Automatic System Diagnostics for real-time performance monitoring
• PathWave Semiconductor Test software with integrated Keysight SPECS
• Optional Factory Automation and Automated Multi-Recipe Execution software
• Shielded Test Enclosure with safety interlock protecting against optical and electrical hazards
• Cleanroom-ready with optimized in-cabinet airflow
• Sound pressure level: <70 dB per EN ISO 779:2010
– Typical Applications
The system supports testing across silicon photonics applications including data communications, optical computing, automotive, and healthcare markets.
– Compatibility & Integration
Designed for cleanroom operations with full wafer prober integration and factory automation software compatibility.
