The Brooks Instrument 5850i is a mass flow controller engineered for precise, repeatable control of carbon dioxide gas flow in demanding industrial manufacturing environments. It delivers stable measurement and control through a unique flow sensor technology and maintains mechanical and electrical compatibility with other mass flow controllers for seamless system integration.
## Technical Specifications
**Flow Performance**
• Flow range: 3 sccm to 1000 SLPM (CO2 specific ranges include 5 SLPM and 12 SLPM)
• Accuracy: ±1% of full scale (≤20 SLPM); ±1.5% of full scale (>20 SLPM)
• Repeatability: 0.25% of rate
• Control range: 50:1 turndown ratio
• Response time: <6 seconds to within 2% of full scale with 0–100% step command
**Stability & Environmental**
• Zero stability: <0.2% of full scale per year; temperature coefficient <±0.075% per °C
• Span stability: temperature coefficient <±1.0% over 10–50°C range
• Mounting attitude sensitivity: ±0.5% maximum full scale deviation after re-zeroing
• Pressure coefficient: ±0.03% per psi (up to 200 psig, N₂ equivalent)
**Operating Pressures**
• Maximum working pressure: 1500 psi (10.342 MPa)
• Allowable differential pressure: 5–50 psi minimum–maximum
• Leak integrity (outboard): 1 × 10⁻¹⁰ atmosphere cc/sec (helium)
**Electrical**
• Power supply: +15 to +28 Vdc
• Power consumption: 2.5 SLPM)
## Typical Applications
Critical gas delivery in semiconductor manufacturing, analytical instrumentation, laboratory research, and precision industrial processes requiring CO₂ flow regulation.
## Compatibility & Integration
Mechanically and electrically compatible with existing mass flow controller installations, supporting standard analog control interfaces and reducing integration complexity.
