The Brooks Instrument / Celerity / Unit Instruments UFC-8100 High Flow Mass Flow Controller delivers precision gas flow regulation using thermal sensing technology and electromagnetic valve control. Engineered for industrial process applications, it combines the patented IsoSensor with minimal dead space to achieve rapid response and exceptional stability across pressure and temperature variations. The controller supports both analog and digital configurations, with DeviceNet communication available and MultiFlo™ technology enabling gas-type changes without system removal.
## Technical Specifications
• **Flow Control Method:** Thermal mass flow sensing with electromagnetic valve actuation
• **Accuracy (Nitrogen calibration):** ±1% of setpoint (digital models 8101, 8105); ±1% of full scale (analog model 8100)
• **Repeatability:** Better than 0.15% of full scale
• **Fast Start Response:** ≤1.0 sec to within 2% of setpoint (per SEMI E17-91)
• **Soft Start Ramp Options:** 5-second linear ramp with selectable intervals (4–6, 6–10, 10–15, 20–30, or 40–60 seconds) for analog MFCs; 0–20 seconds for digital MFCs via MultiFlo Virtual Interface
• **Valve Cycle Life:** Over 8 million cycles with no performance degradation
• **Sensor Drift:** Ultra-low via IsoSensor technology
• **Attitude Insensitivity:** IsoSensor eliminates thermal siphoning effects
• **Surface Finish:** 32 µ inch Ra for relevant applications
• **Footprint:** 1.5 inches
## Key Features
• IsoSensor orientation-insensitive design reduces recalibration intervals
• Minimized dead space for enhanced accuracy and faster transient response
• Auto shut-off option: valve closure below 2% setpoint (0.1 VDC); digital models allow adjustment up to 10% of full scale via MultiFlo Virtual Interface
• Card edge connector standard with detailed pinout configurations available
• Model 8105 offers full ODVA/SEMI compliance for DeviceNet integration
## Electrical & Interfaces
• Analog and digital configurations available
• DeviceNet communication (SEMI Std. Doc. #2602)
• MultiFlo™ Technology for dynamic gas-type and range adjustment without removal
## Materials & Process Compatibility
• Controller body: 316 Stainless Steel, Brass, or Aluminum (FC 8744)
• Diaphragm options: Buna-N, Teflon®, or Viton® fluoroelastomers
• O-ring materials: Viton® fluor and additional elastomer options
• Process gases: Non-corrosive, non-ultraclean applications
