The Cascade Microtech MPS150 is a manual probe station engineered for precise testing of wafers and substrates up to 150 mm in diameter. It offers a stable and modular platform designed to accommodate a variety of applications and accessories, facilitating accurate measurements through precise probe positioning. Its design emphasizes ease of use with an ergonomic layout and a low-profile form factor.
## Technical Specifications
### Mechanical Performance
* **Chuck Stage Travel:** 155 mm x 155 mm (6 in. x 6 in.)
* **Chuck Stage Resolution:** 5 µm
* **Planarity over 150 mm (6 inch):** < 10 µm
* **Load Stroke (Y-axis):** 90 mm
* **Z-Height Adjustment Range:** 10 mm
* **Z-Contact/Separation/Over-travel:** 200 µm (highly-repeatable contact separation)
* **Theta Travel (Standard):** Not specified
* **Theta Travel (Fine):** Not specified
* **Theta Resolution:** Not specified
* **Platen Height Adjustment:** Up to 40 mm
* **Platen Space (Typical):** Not specified
* **Microscope Stage Travel (Manual):** Not specified
* **Microscope Lift (Manual):** Manual, tilt-back or linear pneumatic
* **Microscope Stage Travel (Programmable):** Not specified
* **Microscope Lift (Programmable):** Not specified### Wafer Chuck* **Standard Chuck:** Stainless steel with centric-engraved vacuum grooves
* **Chuck Surface Planarity:** Not specified
* **Wafer Size Capacity:** 25 mm (1 inch) through 150 mm (6 inch)
* **Auxiliary Chucks:** Up to 18 mm x 26 mm
* **TRIAX Chuck:** ±8 fine theta chuck rotation, three auxiliary areas, ±5 µm planarity for consistent contact force and overtravel### Thermal Chuck Performance (for compatible models)* **Temperature Range:** 30°C to 300°C
* **Temperature Resolution:** 0.1°C
* **Temperature Accuracy:** ± 0.1°C
* **Chuck Diameter:** 150 mm nominal
* **Thermal Uniformity:** ≤ 0.5°C @ 25°C, ≤ 2°C @ 200°C
* **Flatness/Parallelism:** ≤ 30 µm over full temperature range
* **Isolation (Non-Thermal Chucks):** 1x10¹¹ Ω @ 25°C, 1x10¹⁰ Ω @ 200°C
* **Isolation (Thermal Chucks):** Breakdown voltage (Force-to-guard) specified for specific models (e.g., MPS-TC150-300C1)
* **Leakage Current (Triax Setup):** Typically < 3 fA at 1 kHz, 10V (Dependent on atmosphere and humidity)### Electrical Performance (Triaxial Setup)* **Minimum Leakage Current:** Specified down to fA levels
* **Minimum Measurement Resolution:** Specified down to fF levels (with upgrade option)
* **Test Conditions for Leakage:** Force 10 V on each SMU; integration time - long; limit range - fixed 10 pA; measure current
* **Noise and Leakage Measurement:** Typically < 3 fA at 1 kHz### Physical Dimensions* **Station Platform (with Bridge):** 588 mm (W) x 638 mm (D) x 654 mm (H) (23 in. x 25 in. x 26 in.)
* **Weight:** ~60 kg (132 lb.)### Facility Requirements* **Power (Base Machine):** Not required
* **Vacuum:** -0.8 bar
* **Compressed Air:** 4 bar
* **Supply Voltage (for specific components/options):** 100/230 VAC 50/60 Hz
* **Supply Air (for specific components/options):** 350 liters/min (12.4 SCFM)
* **Power Consumption (for specific components/options):** 530 VA (typical)### Compatibility and ApplicationsThe Cascade Microtech MPS150 is designed to support a broad range of applications, including:* C-V/I-V Measurements
* RF Measurements
* mm-Wave and sub-THz Measurements
* Device and Wafer Characterization Tests (DWC)
* Failure Analysis (FA)
* Submicron Probing
* MEMS Testing
* Optoelectronic Engineering Tests
* Wafer-Level Reliability (WLR) Applications
* High-Current Measurements (up to 100 A with specific configurations)
* On-wafer power device characterization
* Load-pull applications### Regulatory Compliance* **Certification:** CE, cNRTLus, CB### Ordering Information (Example Configurations)The MPS150 is available in pre-configured application-dedicated packages:* **EPS150COAX:** 150 mm manual probing solution for DC parametric test
* **EPS150COAXPLUS:** 150 mm manual probing solution for DC parametric test (including platen lift)
* **EPS150TRIAX:** 150 mm manual probing solution for low-noise measurements
* **EPS150RF:** 150 mm manual probing solution for RF applications
* **EPS150MMW:** 150 mm manual probing solution for mmW, THz and load pull applications
* **EPS150FA:** 150 mm manual probing solution for failure analysisWhy Choose Aumictech for Cascade Microtech MPS150?
At Aumictech, we specialize in supplying high-end wafer probing equipment. Whether you need robust solutions for DC parametric testing, low-noise measurements for sensitive applications, or advanced configurations for RF and mm-Wave characterization, our team ensures the Cascade Microtech MPS150 delivers maximum performance for your application.
