The Keithley 4200-SCS is a modular parameter analyzer built for semiconductor device characterization, material analysis, and process development. It delivers DC I-V, C-V, and pulsed measurements with high precision across nine configurable instrument slots. The system runs on an embedded Windows-based PC with KITE software for test definition, execution, data analysis, and reporting.
Technical Specifications
Source-Measure Units (SMUs)
• Voltage measurement and sourcing: 1 µV to 210V
• Current measurement and sourcing: 0.1 fA to 1A (expandable to 2.6A or 4.4A)
• Standard resolution: 100 fA; optional 0.1 fA with Remote PreAmp (4200-PA)
• Medium power (4200-SMU): 2.2W, four-quadrant operation
• High power (4210-SMU): 22W, four-quadrant operation
• Up to nine SMUs per system
Pulsed and Transient Measurements
• Ultra-Fast I-V Module (4225-PMU): 1V/ns slew rate with simultaneous voltage and current measurement
• Pulse generators (4205-PG2): ±20V output into 50Ω, pulse width down to 10 ns
• Sampling rate: up to 200 MSa/sec at 5 ns intervals
AC Impedance and C-V
• Multi-Frequency C-V Module (4210-CVU): 1 kHz to 10 MHz
• Capacitance measurement range: aF to µF
• Extended frequency support: 10 mHz to 10 Hz (quasi-static)
• DC bias: ±30V (60V differential); expandable to ±200V (400V differential) with optional packages
Digital Oscilloscope
• Model 4200-SCP2: 8-bit resolution, 2.5 gigasamples/second
– Key Features
• Nine instrument slots for flexible module configuration
• Four-quadrant source/sink capability across all SMU types
• Pulsed testing for charge trapping and isothermal applications
• Wide frequency range from DC through 10 MHz
• Embedded Windows PC with intuitive KITE software interface
– Typical Applications
• Semiconductor device parameter extraction
• Process development and characterization
• Material analysis and research
• Production testing
– Compatibility & Integration
The modular architecture accepts medium and high power SMUs, pulsed measurement units, C-V modules, and oscilloscope cards in any combination within the nine available slots.
