The Keithley 4210-CVU Capacitance Voltage Unit is a specialized instrument for precise capacitance-voltage characterization in semiconductor device analysis, materials science research, and quality control. This module integrates with Keithley test systems to deliver accurate CV measurements across multiple modes, including C-V, G-V, and C-f analysis. The unit combines high-resolution capacitance sensing with programmable DC and AC voltage sourcing, enabling detailed electrical parameter extraction and device modeling.
Technical Specifications
Capacitance Measurement
• Supports wide capacitance measurement range across diverse material and device types
• High measurement accuracy with defined accuracy figures for various operating conditions
• High resolution for detection of subtle capacitance changes
• Operates across a specified frequency range to analyze capacitance dispersion and frequency-dependent effects
• Incorporates offset compensation to minimize measurement errors
Voltage Source
• Programmable DC voltage range for bias sweep measurements
• Programmable AC voltage amplitude for small-signal capacitance characterization
• Specified voltage accuracy and resolution for both DC and AC outputs
• Supports programmable voltage sweeps with configurable step sizes and dwell times
Measurement Capabilities
• Multiple measurement modes: C-V, G-V (conductance-voltage), and C-f (capacitance-frequency)
• Optimized measurement speed for production and laboratory throughput
• Low noise floor to preserve measurement integrity for sensitive characterization
– Key Features
• Direct integration with Keithley 4200-SCS Parameter Measurement Unit and compatible Keithley platforms
• Standard communication protocols for test system control and data acquisition
• Modular form factor for chassis-based test system architecture
• Operates within specified temperature and humidity ranges for lab and production environments
– Compatibility & Integration
The 4210-CVU connects directly to the Keithley 4200-SCS PMU and other compatible Keithley test platforms, utilizing standard communication protocols for seamless system integration.
