The TYLAN FC-260 is a precision mass flow controller engineered for oxygen in air applications requiring stable, repeatable gas flow regulation up to 250 SCCM at inlet pressures to 150 PSIG. Built around a solid-state valve assembly with an attitude-insensitive flow sensor, this controller delivers ±1% full-scale accuracy and ±0.5% repeatability—critical performance metrics for semiconductor processes and laboratory work. The FC-260 operates under laminar flow conditions with a 6-second response time and accepts 0 to 5 VDC control signals, scaling linearly across its full operating range.
Technical Specifications
• Flow Capacity: 250 SCCM maximum; O₂ in air configuration
• Inlet Pressure Rating: 150 PSIG maximum
• Accuracy: ±1% of full scale
• Linearity: ±2% of full scale
• Repeatability: ±0.5% of full scale
• Response Time: 6 seconds (step-dependent)
• Attitude Sensitivity: None—orientation-independent operation
• Flow Regime: Laminar flow conditions with eliminated internal dead volumes
• Valve Design: Solid-state assembly with superior bypass architecture
• Sensor: Attitude-insensitive flow sensor
– Key Features
• Type 316 stainless steel wetted materials with elastomer seals (Viton®, Kalrez®, or Neoprene selectable by gas type)
• Position-agnostic mounting without zero-point recalibration
• Long-term repeatability exceeding semiconductor process demands
• 0 to 5 VDC input/output signal conditioning
• Power requirements: +15 VDC @ 25 mA max, −15 VDC @ 180 mA max; 4.0 watts total consumption
– Typical Applications
Semiconductor fabrication, laboratory process control, and oxygen-in-air flow regulation where tight tolerance and long-term stability govern process windows.
– Compatibility & Integration
Accepts 0 to 5 VDC control signals with 0 to 5 VDC output feedback. Adaptable to processes using gases with known conversion factors beyond oxygen. Elastomer sealing accommodates multiple gas families through seal material selection.
