The Keysight 5517C is a helium-neon laser head that delivers a stable 633 nm wavelength source for precision measurement and laser interferometry systems. This Class II gas laser produces continuous-wave output across multiple power options (180 µW minimum to 1 mW maximum), with wavelength stability of 2 ppb over one hour and 20 ppb lifetime. The 5517C generates a coherent, collimated two-frequency beam with orthogonal polarization components, standard 6 mm diameter (3 mm and 9 mm options available), and beam height of 79.5 ± 1.0 mm. Warm-up time is approximately 10 minutes typical, extending to 90 minutes with fan connection.
Technical Specifications
• Wavelength: 633 nm
• Output Power: 180 µW minimum; 1 mW maximum (H03: 300 µW, H05: 240 µW, H07: 400 µW options)
• Wavelength Stability: 2 ppb (1 hour); 20 ppb (lifetime)
• Wavelength Accuracy: ±0.1 ppm standard; ±0.02 ppm with optional calibration
• Reference Frequency: 2.4 to 3.0 MHz
• Operation Mode: Continuous Wave (CW)
• Warm-up Time: 10 minutes typical; up to 90 minutes with fan connection
• Input Power: +15 V ±0.3 V at 2.5 A max; −15 V ±0.3 V at 0.02 A max
• Heat Dissipation: 23 W (operation); 35 W (warm-up)
• MTBF: >50,000 hours
– Key Features
• Two-frequency coherent beam with orthogonal linear polarization (horizontal and vertical)
• Beam diameter options: 3 mm, 6 mm (standard), 9 mm
• Three-position shutter (open, reduced, closed)
• Resolution down to 2.5 nanometers with resolution extension
• Maximum linear velocity: 711 mm/s; up to 696 mm/s with E1709A receiver
• Measurement range: 40 meters nominal for single-axis; multi-axis sum must meet this specification
– Typical Applications
• VME- and PC-based laser interferometer systems
• Semiconductor lithography alignment and measurement
• Flat panel display manufacturing
• High-precision motion measurement systems
– Compatibility & Integration
• Integrates with standard VME and PC-based interferometer platforms
• Operates with compatible receivers including the E1709A
• Non-fiber-coupled; direct optical beam delivery
• Dimensions: 36 cm L × 14 cm W × 13 cm H; weight 3.4 kg
