The Keysight 5517D is a Class II helium-neon laser head engineered for dual-frequency interferometry and precision displacement measurement. Operating at 633 nm with two-frequency output, it delivers wavelength stability of 2 ppb over one hour and 20 ppb lifetime, with accuracy to ±0.1 ppm standard or ±0.02 ppm with optional calibration. The 5517D achieves maximum linear velocity of 1012 mm/s with linear optics and E1709A receiver, supported by MTBF exceeding 50,000 hours. Output power ranges from 180 µW minimum (standard) to 1 mW maximum, with optional 300 µW configuration. Warm-up requires 90 minutes, or 45 minutes with fan and exhaust connected to vented cover. The unit weighs 3.4 kg and operates from ±15 V supplies via Agilent 10884B power supply or equivalent.
Technical Specifications
• Laser Type: Class II helium-neon, continuous wave, two-frequency
• Wavelength: 633 nm
• Reference Frequency: 3.4 to 4.0 MHz
• Wavelength Stability: 2 ppb (1 hour); 20 ppb (lifetime)
• Wavelength Accuracy: ±0.1 ppm (standard); ±0.02 ppm (optional calibration)
• Output Power: 180 µW minimum (standard), 300 µW optional (H01), 1 mW maximum
• Beam Diameter: 6 mm standard; 9 mm optional (option 009)
• Beam Height: 79.5 ± 1.0 mm
• Maximum Linear Velocity: 1012 mm/s (with linear optics and E1709A receiver)
• Warm-up Time: 90 minutes; 45 minutes (with vented cover fan/exhaust)
• MTBF: > 50,000 hours
• Power Supply: +15 V ± 0.3 V @ 3.0 A max; -15 V ± 0.3 V @ 0.3 A max; -15 V ± 0.3 V @ 0.02 A max
• Heat Dissipation: 35 W (warm-up); 23 W (operation)
• Weight: 3.4 kg (7.5 lb)
– Key Features
• Dual-frequency output for interferometric applications requiring high resolution
• Exceptional wavelength stability and long-term accuracy
• Configurable output power and beam diameter for system optimization
• Extended laser tube life with MTBF > 50,000 hours
– Typical Applications
• Semiconductor lithography
• Flat panel display manufacturing
• Precision positioning and advanced machining
• High-resolution displacement measurement systems
– Compatibility & Integration
The 5517D integrates with VME-based and PC-based systems, including Keysight 5501A, 5527A, and 5572A platforms. Beam diameter options ensure compatibility with Keysight interferometer heads: 10719A, 10721A, 10737L/R, 10735A, and 10736A. Requires Agilent 10884B power supply or equivalent.
