The Agilent/Keysight 5517FL is a Class II helium-neon laser source engineered for high-precision dual-frequency interferometry in demanding metrology and positioning applications. Operating at 632.99139 nm, this laser delivers stable output exceeding 65 µW (minimum, with degradation to 50 µW after 3 years) and supports measurement ranges to 40 meters across all axes. The 5517FL is optimized for VME and PC-based laser interferometer systems requiring high-velocity motion, particularly in semiconductor lithography and flat panel display manufacturing environments.
Technical Specifications
Optical Performance
• Wavelength: 632.99139 nm (nominal, vacuum)
• Wavelength accuracy: ±0.1 ppm (3 sigma, lifetime); ±0.02 ppm with factory calibration to MIL-STD 45663
• Wavelength stability: ±0.002 ppm (1 hour, typical); ±0.02 ppm (lifetime)
• Output power (minimum): >65 µW standard; >300 µW with option H01
• Maximum output power: 1 mW
• Beam diameter: 6 mm standard; 9 mm with option 009
• Beam height: 80.8 ± 1.0 mm
Measurement & Performance
• Maximum linear velocity: 2 m/s with E1709A receiver (linear optics)
• Reference frequency: ≥7.0 MHz standard; 7.2 MHz with option 300
• Measurement range: 40 meters (sum of all axes)
• Warm-up time: 45 minutes (vented cover with fan); 90 minutes (vent body with fan)
Electrical
• Power requirement: +15 V ±0.3 V at 2.2 A maximum; −15 V ±0.3 V at 0.03 A maximum
• Heat dissipation: 23 W operating; 35 W warm-up
• MTBF: >50,000 hours typical
– Key Features
• Class II laser conforming to 21 CFR 1040.10 and 1040.11
• Compact 3.2 kg form factor with 10.16 cm clearance required for cabling
• High wavelength accuracy enabling precision optical alignment
– Typical Applications
• VME-based laser interferometer systems
• PC-based positioning systems
• Semiconductor lithography equipment
• Flat panel display manufacturing
– Compatibility & Integration
Requires Agilent 10884B power supply or equivalent 15 V source. Keysight E1709A receiver required for maximum linear velocity specification.
