The Agilent/Keysight 10713B is a He-Ne laser head component that generates the coherent beam for high-precision laser interferometer positioning systems. Operating at 633 nm with exceptional wavelength stability, this bare cube corner unit delivers measurement capability up to 40 meters across multiple axes, making it the optical foundation for precision motion control in demanding manufacturing environments.
Technical Specifications
• Laser Type: He-Ne laser source
• Wavelength: 633 nm (nominal)
• Wavelength Accuracy: ± 0.1 ppm (vacuum, 3 sigma, lifetime)
• Wavelength Stability: ± 0.002 ppm (1 hour, typical, vacuum); ± 0.02 ppm (lifetime, vacuum)
• Measurement Range: Up to 40 meters (130 feet) for sum of all axes
• Beam Diameter: 6 mm standard
• Heat Dissipation: 23 W operating; 35 W warm-up
• MTBF: > 50,000 hours typical
• Magnetic Field Strength: ≤ 5.25 milliGauss at 4.6 m (15 ft) distance from packaged laser head surface (non-operating)
• Weight: 11.4 g (0.4 oz) bare cube corner
• Safety Classification: Class II laser per 21 CFR 1040.10 and 1040.11
– Key Features
• Bare cube corner design—no external housing required
• Vacuum-referenced wavelength stability ensures long-term measurement integrity
• Sub-ppm accuracy maintained across product lifetime
• Compact form factor optimized for integration into interferometer optical trains
• Minimal magnetic field emission suitable for sensitive semiconductor and display manufacturing environments
– Typical Applications
• Semiconductor lithography alignment and positioning
• Flat panel display manufacturing
• High-volume production environments demanding sub-micron motion control and measurement
– Compatibility & Integration
The 10713B integrates with Keysight’s laser interferometer ecosystem, including 5517 series laser heads, compatible optics for beam direction and measurement, and supporting electronics (backplane, receivers) required to form complete interferometer systems. Back-clearance requirement: 10.16 cm for cabling.
