The Agilent/Keysight E5270A is an 8-slot mainframe for high-speed DC parametric measurements and device characterization. This fully configurable platform integrates multiple Source/Monitor Unit (SMU) modules to deliver flexible IV characterization, pulsed measurements, and material analysis across research, development, and production environments. The mainframe architecture combines a high-resolution ADC shared across all installed modules with dedicated high-speed ADCs on each SMU, enabling accelerated testing with measurement resolution as low as 0.5 µV and 0.1 fA depending on measurement range.
Technical Specifications
Mainframe Architecture
• 8-slot modular design supports up to eight single-slot or four dual-slot modules, or combinations thereof
• High-resolution and high-speed ADC architecture for precision measurements
• 16 general-purpose digital I/Os
• Enhanced program memory for accelerated test sequences
• Self-test, self-calibration, and diagnostics capabilities
Power and Ground
• AC input: 90 V to 264 V, 47 Hz to 63 Hz
• Maximum module power consumption: 80 W total
• Maximum output power: 80 W
• Maximum common-to-ground voltage: ≤42 V
• Integrated Ground Unit (GNDU): 0 V ±100 mV output, 4 A maximum sink current (Triaxial/Kelvin connection)
Pulsed Measurement Range
• Pulse width: 500 µs to 2 s
• Pulse period: 5 ms to 5 s
• Pulse resolution: 100 µs
– Key Features
• Dual-tier ADC topology—shared high-resolution converter plus module-integrated high-speed measurement
• Modular SMU architecture supports High Power (2 mV–200 V, 10 fA–1 A), Medium Power (2 mV–100 V, 10 fA–200 mA), and High Resolution configurations
• Front-panel interface for spot measurements alongside programmed test automation
– Typical Applications
• Semiconductor device characterization and parametric testing
• Material property measurement and research
• Production-level IV curve acquisition
• Pulsed-bias device analysis
– Compatibility & Integration
Supported modules include the E5280A High Power SMU (2-slot), E5281A Medium Power SMU (1-slot), High Resolution SMU (HRSMU), and Atto Sense/Switch Unit (ASU). User-selectable module combinations enable tailored solutions for specific measurement requirements.
