The Keysight E5281A is a Medium Power Source/Monitor Unit (MPSMU) module designed for integration into the E5270A/B Parametric Measurement System Mainframe. This SMU delivers precise DC and low-frequency AC characterization for semiconductor device and material evaluation across research, development, and quality control environments.
Technical Specifications
Voltage & Current Ranges
• Voltage: 2 µV to 100 V
• Current: 10 fA to 200 mA
• Voltage compliance: 0 V to ±100 V
• Current compliance: ±1 pA to ±100 mA or ±100 pA to ±1 A
• Compliance accuracy matches the current (or voltage) set accuracy
Measurement Resolution
• Current resolution: 0.1 fA or 10 fA
• Voltage resolution: 0.5 µV or 2 µV
Operational Limits
• Up to 20 mA at 100 V
• Up to 100 mA at ±20 V
• Up to 200 mA at ±20 V
• Module power consumption: maximum 80 W within E5270B mainframe
• Module weight: 1.4 kg
– Key Features
• Supports up to eight MPSMU modules in a single E5270A/B mainframe for multi-channel testing
• Source and measure voltage or current simultaneously with compliance protection
• Low-noise design enables femtoampere-level current resolution
• Compliance functions prevent device damage during parametric sweeps
– Typical Applications
• I-V characterization of semiconductors and discrete devices
• DC parametric measurements in device development cycles
• Low-frequency AC testing for material and component validation
• Multi-point device characterization with compliance control
– Compatibility & Integration
The E5281A is exclusively compatible with Keysight E5270A and E5270B 8-slot mainframes. Operation integrates with Keysight’s EasyEXPERT group+ software suite, which provides parametric measurement functions, test automation, and data management. Standard GPIB connectivity supports remote instrument control and integration into automated test systems.


















