The AGT354C is a precision temperature control recirculator engineered for stable thermal management of process gases and fluids across semiconductor manufacturing, vacuum systems, and thermal conditioning applications. Built around a closed-loop circulating liquid system with non-CFC refrigeration, high-output heating, and positive displacement pump technology, it maintains ±0.1°C accuracy while eliminating water waste in cylinder gas applications.
Technical Specifications
• Temperature range: 0°C to 75°C
• Temperature accuracy: ±0.1°C
• Cooling capacity @ 20°C ambient: 675 W (20°C setpoint), 250 W (4°C setpoint)
• Heating capacity: 1500 W
• Pump displacement: 10.5 LPM (2.8 GPM)
• Maximum pump pressure: 160 PSI with internal bypass protection
• Reservoir volume: 12 liters (3.2 gallons)
• Fluid connections: ¼” female NPT (discharge and return)
• Dimensions: 29″ H × 17″ W × 17″ D
• Shipping weight: 58 kg (127 lbs)
– Key Features
• Microprocessor-based PID controller with proportional cooling and heating modulation
• Platinum RTD temperature sensor for precision measurement
• Thermal stabilization via large reservoir acting as thermal flywheel
• RS485 and RS232 serial communication via 9-pin D-port connector
• 4-20 mA analog output (4-pin CPC connector) proportional to process temperature
• Mobile design with locking casters; requires level surface and 12″ clearance for ventilation
• Front panel Start/Run (green) and Stop (red) controls
– Typical Applications
• Semiconductor etch and CVD process gas temperature regulation
• Vacuum pump thermal management
• Reactor flange and Mass Flow Controller conditioning
• Power supply and condenser temperature control
• Cylinder gas temperature management via AG-J Heat Exchange Jackets
– Compatibility & Integration
Available in two electrical configurations: AGT354C-1 (115 V, 60 Hz, 30 A, 1 Ph with NEMA L5-30P) and AGT354C-2 (230 V, 50 Hz, 15 A, 1 Ph requiring 230V 20A 1Ph 50Hz circuit). Optional accessories include no-flow switch, audible temperature alarm, and 4-20 mA output package. Compatible with AG-J Heat Exchange Jackets for extended thermal control applications.
