The Bruce Technologies/Amtech Systems INTEMPO-S is an intelligent temperature controller engineered for precise thermal management in horizontal diffusion and VCVD furnaces used in semiconductor fabrication. It delivers advanced rule-based control algorithms with multi-zone temperature regulation, thermocouple input sensing, and intelligent failure protection to safeguard wafer loads and process integrity. The controller combines fast scan rates with enhanced furnace recovery capabilities to reduce cycle times and increase throughput, making it essential for demanding silicon carbide and silicon power device manufacturing environments.
## Technical Specifications
• **Temperature Control:** Five-zone control architecture with advanced rule-based algorithms and PID functionality
• **Thermal Management:** Enhanced temperature accuracy and stability with improved furnace recovery
• **Sensor Input:** Thermocouple-based temperature sensing
• **Control Output:** Heater element management and thermal actuator control
• **Protective Functions:** Load element short/open circuit protection via Impedance Relay function; thermocouple failure detection and safeguarding
• **Response:** Increased scan rates for faster system reaction
• **Power Supply:** 200–480 VAC or 200–690 VAC, 3-Phase, 50/60 Hz; universal control supply 90–270 V AC, 50/60 Hz
## Key Features
• Rule-based profile thermocouple control prevents costly wafer loss during sensor failures
• Multi-zone architecture enables independent thermal zone management
• PID control capability supports standalone operation or integrated process control
• Impedance Relay protection guards against heating element faults
• Fast thermal recovery reduces overall process cycle time
## Typical Applications
• Horizontal diffusion furnace thermal management
• VCVD (Vertical Chemical Vapor Deposition) process control
• Silicon carbide device fabrication
• Silicon power device manufacturing
• High-volume semiconductor production requiring consistent thermal profiles
## Compatibility & Integration
• Accepts standard thermocouple inputs for temperature measurement
• Compatible with 3-phase industrial power distribution (50/60 Hz)
• Operates from universal control supply voltages supporting global deployment
• Model designations: INTEMPO-S; also identified as Model 7640 or Kokusai 2173097
