The Keithley 7072 is an 8×12 semiconductor matrix card engineered for high-density device testing and parametric characterization. This specialized switching module connects multiple devices under test to precision instrumentation, handling low-level, high-impedance signals from wafer-level testing through final device validation. Its triaxial architecture and fully guarded measurement design enable sub-picoamp resolution and capacitance-voltage characterization across DC to 1 MHz.
Technical Specifications
Matrix Configuration: 8 rows × 12 columns with mixed-signal paths. Two low-current paths deliver sub-picoamp offset current for sensitive measurements. Two C-V paths operate DC to 1 MHz. Six general-purpose paths maintain less than 20 pA offset current and handle signals to 200 V, 1 A carry / 0.5 A switched, 10 VA peak into resistive loads.
Contact Performance: Path resistance measures less than 1 Ω initially, degrading to less than 3.5 Ω at end of life. Contact potential stays below 40 µV per cross-point (Signal to Guard). Cold switching life reaches 10⁷ closures; at maximum signal level, 10⁵ closures. Relay settling time is less than 15 ms. Common mode voltage rating: 200 V maximum between any two pins or chassis.
Signal Integrity: Insertion loss at 1 MHz (50 Ω source and load) is 0.1 dB typical. Fully guarded measurement topology with center conductor surrounded by inner conducting shield. Isolation relays automatically disconnect unused circuits to minimize crosstalk.
– Key Features
• 3-lug triaxial connectors (Signal, Guard, Chassis) for noise shielding
• Low-current and C-V rows extendable to other cards via coaxial jumpers
• General-purpose signal paths connect directly to mainframe backplane
• Operating temperature range: 0° to 50°C (≤35°C at 70% R.H.)
• Storage temperature range: –25° to +65°C
• Compliant with EN61010-1/IEC 1010
– Typical Applications
Sub-picoamp measurements on semiconductor devices. Capacitance-voltage characterization. Parametric testing of discrete and integrated circuits. Multi-device test routing and isolation.
– Compatibility & Integration
Connects to Keithley 707A, 707B, 708A, and 708B mainframes. Compatible with Model 2410 and 237 SMU instruments, Series 2600B SourceMeter SMU, and 4200-SCS Parameter Analyzers.
