The Mactronix AHT-600 Wafer Transfer Slides are engineered for precise, contamination-controlled movement of semiconductor wafers between processing stations and cassette carriers. These systems minimize particle introduction and prevent physical damage during transit through integrated safety sensors, adjustable resistance monitoring, and fail-safe retainer mechanisms. Built from antistatic, chemical-resistant materials rated to ISO 4 (FS209E Class 10) cleanroom standards, the AHT-600 delivers high-uptime automation in demanding semiconductor manufacturing environments.
Technical Specifications
• Wafer Size Compatibility: 4-inch (100 mm), 5-inch (125 mm), 6-inch (150 mm), and 300 mm wafers
• Wafer Transfer Capacity: Up to 25 wafers per transfer; senior series models handle up to 75 wafers
• Particle Contamination: ≤1.5 particles >0.23 μm per wafer per transfer (system-dependent)
• Transfer Speed: 50-wafer batch completion in 99.25% uptime; MTBF 2,500 hours; MTBA 1,000 hours
• Material Construction: Antistatic, chemical-resistant components; hard black anodized aluminum for corrosion resistance
– Key Features
• Carrier-type detection sensors prevent accidental double-loading and confirm correct positioning
• Adjustable transfer arm resistance sensor protects wafer integrity during motion
• Pressure sensors enhance personal safety and prevent wafer damage
• Fail-safe retainers default to closed position on power loss or pneumatic pressure loss
• Ramped velocity control enables smooth, rapid transfers
• Single Board PC or PLC control with keypad/LCD or touchscreen interface
• RS232/RS422 communication ports for system integration
– Compatibility & Integration
• Carrier Types: SEMI-compliant cassettes, plastic process boats, metal cassettes, Teflon®, Quartz, Silicon Carbide, and Polysilicon carriers
• Cassette Profiles: High- and low-profile plastic cassettes; metal cassettes; standard H-BAR shipping cassettes
• Control Options: Single Board PC or PLC architecture with user-configurable interfaces
• Communications: RS232 or RS422 ports for factory integration and remote monitoring
