The Millipore/Tylan FC-2910V is a precision mass flow controller engineered for accurate gas flow regulation in semiconductor processing and industrial applications. Built on the proven FC-2900/FM-3900 series platform, this solenoid-controlled instrument delivers ±1.0% full-scale accuracy with 50:1 turndown across flow ranges from 100 sccm to 50 slpm (N₂ equivalent). Its thermal gas flow sensor, elastomer-sealed construction, and auto-zero circuitry enable stable operation in demanding environments with reactive and corrosive gases.
Technical Specifications
• Flow Ranges (N₂ equivalent): 100 sccm – 50 slpm
• Accuracy: ±1.0% of full scale
• Repeatability: ±0.2%
• Linearity: ±0.5%
• Turndown Ratio: 50:1
• Step Response Time: 500 ms typical (up to 1 sec depending on conditions)
• Settling Time: <1.5 seconds
• Maximum Operating Pressure: 1150 kPa (150 psig)
• Proof Pressure: 10,500 kPa (1500 psig)
• Nominal Differential Pressure: 0.7 – 2.8 bar (10–40 psid)
• Pressure Coefficient: 0.001%/kPa (0.007%/psi)
• Operating Temperature Range: 0–50 °C
– Key Features
• Solenoid control valve with Teflon poppet; normally-closed or normally-open configuration options
• Deadband <2% full scale (normally-closed) or <5% full scale (normally-open)
• Thermal gas flow sensor with auto-zero circuitry for drift compensation and temperature coefficient adjustment
• Slotted-disc bypass design (FC-291x series) with adjustable plug for range and stability tuning
• Bypass operates under laminar flow conditions; easily removable for range changes
• Compatible with reactive and corrosive gases
– Typical Applications
• Semiconductor processing and etch/deposition systems
• Low vapor pressure material delivery
• Industrial gas flow control requiring high accuracy and repeatability
– Compatibility & Integration
The FC-2910V accepts process control system triggers for auto-zero operation and integrates into systems requiring precise metering of specialty gases across wide dynamic ranges.
