The Millipore/Tylan VC4900M-4V is a precision vapor flow controller engineered for semiconductor manufacturing and industrial processes requiring low vapor pressure liquid delivery. This normally closed solenoid valve delivers organometallic compounds and specialized vapors with exceptional accuracy and minimal pressure drop, making it the preferred choice for sensitive CVD, ALD, and dopant delivery applications.
Technical Specifications
• Flow Rate Range: 10 sccm to 30 slm (user-adjustable full scale)
• Turndown Ratio: 20:1
• Accuracy: ± 1.0% of full scale
• Linearity: ± 0.5% of full scale
• Repeatability: ± 0.2% of full scale
• Temperature Coefficient: ± 0.05% per °C (zero and span)
• Pressure Coefficient: -1.0% / 100 Torr (50–100 Torr range)
• Pressure Drop: As low as 6.7 kPa (50 Torr)
• Maximum Operating Pressure: 1135 kPa (150 psig)
• Operating Temperature: 0°C to 50°C
• Seal Material: Nickel 200 metal seals (Viton™ elastomer option available)
• Weight: 0.9 kg without remote electronics; 1.7 kg with remote electronics
– Key Features
• Enlarged valve orifice and high-stroke design maximize conductance while minimizing pressure drop
• Large diameter sensor tube enables precision control across the full 20:1 turndown ratio
• Auto zero function maintains repeatable baseline under zero flow conditions
• Enhanced zero and span stability for long-term process consistency
• Fast response with minimal overshoot
• ≥98% shutoff capability (normally closed architecture)
• RFI protected
• Metal seals provide superior protection for reactive and corrosive vapor streams
– Electrical & Control
• Power Supply: ±15 VDC
• Signal Output: 0–5.0 VDC (linearly proportional to flow rate)
• Input Impedance: 0.5 megohm minimum
• Command Voltage Source Impedance: ≤2500 ohms
• Connector: Card edge
• Optional 4–20 mA current output available on VC-4901 and VC-4902 variants
– Compatibility & Integration
Mechanically and electrically interchangeable with most Tylan General mass vapor controllers. Part of the VC4900 series family: VC4900, VC4900M, VC4901, VC4902, VC4901M, VC4902M.
