The MKS Instruments 1179A51CS1BV is a Mass-Flo Controller engineered for precise measurement and control of gas mass flow rates across industrial and analytical applications. Built on MKS’s proprietary laminar flow measurement technique, the instrument employs a bypass element in parallel with a sensor tube to deliver accurate flow indication. The design incorporates a metal cover and RF bypass capacitors to minimize RFI and EMI interference.
Technical Specifications
• Flow Rate Ranges: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10,000, 20,000, and 30,000 sccm (N₂ equivalent)
• Control Range: 2% to 100% of Full Scale
• Accuracy: ±1.0% of Full Scale
• Repeatability: ±0.2% of Full Scale
• Resolution: 0.1% of Full Scale
• Zero Temperature Coefficient: <0.05% of Full Scale/°C
• Span Temperature Coefficient: <0.08% of Reading/°C
• Pressure Coefficient: <0.02% of Reading/psi
• Warm-up Time: <2 minutes
• Settling Time: <2 seconds
• Maximum Inlet Pressure: 150 psig
• Operating Pressure Differential: 10–40 psid (10–5000 sccm); 15–40 psid (10,000–30,000 sccm)
• External Leak Integrity: <1 × 10⁻⁹ scc/sec
• Leak Through Closed Valve: <1.0% of Full Scale at 40 psig inlet
– Key Features
• Three-inch compact footprint
• Power Requirements: ±15 VDC (200 mA startup, 100 mA steady-state)
• Set Point Command: 0–5 VDC input
• Flow Output Signal: 0–5 VDC
• D-sub connectors (9-pin or 15-pin)
• Wetted materials: 316L Stainless Steel, Viton®, Nickel
• Seal options: Viton®, Neoprene®, Kalrez®, Buna-N, All-Metal
• Fitting options: Swagelok® 4 VCR®, 4 VCO®, or ¼" Swagelok®
– Typical Applications
Gas delivery systems requiring stable, reliable control in semiconductor manufacturing, laboratory analysis, and process automation environments.
– Compatibility & Integration
Accepts analog command signals from <20 kΩ impedance sources. Calibrated to N₂ (or equivalent). External shut-off valve recommended for zero leakage integrity.
