The MKS Instruments 153F-16063 is a “Smart” Throttle Valve Controller that integrates pressure regulation, valve actuation, and digital control into a single compact unit. It combines a MKS Type 253 throttle valve with an embedded microprocessor and RS-232 communication interface, eliminating the need for external controller hardware. The device employs a digital pressure/position control algorithm with self-tuning capabilities to deliver fast, stable setpoint achievement and repeatable process recipes.
Technical Specifications
• Control Algorithm: Digital pressure/position control with self-tuning
• Integrated Valve: MKS Type 253 Throttle Valve
• Power Supply: +15 to +30 VDC (typical: +15, +24, or +28 VDC)
• Power Consumption: ~6 Watts
• Communication: RS-232
• Setpoint Input: External analog voltage or RS-232 digital message
• Pressure Sensing: Direct transducer input
• Memory: Non-volatile storage of calibration constants and last valve position
– Key Features
• Dual-mode operation in flapper positioning or pressure control
• Self-tuning algorithm learns system time constants, transfer functions, and valve gain for optimized performance
• Non-volatile memory preserves calibration and valve state across power cycles, enabling immediate operation on restart
• Accepts setpoints via analog voltage input or digital RS-232 commands
• Reads pressure feedback directly from external transducers
• Automated closed-loop regulation minimizes manual tuning and setup time
– Typical Applications
Downstream pressure control in vacuum systems requiring automated setpoint regulation and process repeatability.
– Compatibility & Integration
Designed for seamless operation with MKS Type 253 throttle valve assemblies. The integrated architecture eliminates external controller requirements and reduces system footprint.
