The MKS Instruments 2179A12CR1BV is a Mass-Flo® Controller engineered for precise, repeatable mass flow control of gases in semiconductor processing, analytical instrumentation, and research environments. This general-purpose unit combines a patented thermal sensor for mass flow measurement with a fast-acting proportioning valve, integrated shut-off capability, and RFI/EMI minimization in a compact design. It accepts TTL level commands for remote operation and delivers ±1.0% of Full Scale accuracy across its 100 sccm nitrogen range.
Technical Specifications
• Flow Range: 100 sccm (Nitrogen, N2) with control from 2% to 100% of Full Scale
• Accuracy: ±1.0% of Full Scale (includes non-linearity, hysteresis, and non-repeatability at 760 mmHg, 0°C)
• Repeatability: ±0.2% of Full Scale
• Settling Time: <2 seconds per SEMI E17-91
• Warm-up Time: <2 minutes to within 0.2% of Full Scale steady-state performance
• Pressure Coefficient: <0.02% of Reading/psi
• Temperature Coefficients:
– Zero: <0.05% of Full Scale/°C
– Span: <0.08% of Reading/°C
– Repeatability: <0.05% of Full Scale/°C
– Resolution: <0.08% of Reading/°C
• Operating Temperature: 0°C to 50°C
• Supply Voltage: ±15 VDC (±5%), 200 mA at startup, 100 mA steady state
• Control Signal: 0–5 VDC from 10 kΩ load; <1 Ω output impedance
– Key Features
• Integral normally closed shut-off valve with positive shut-off
• Shut-off valve leak integrity: <4 × 10⁻⁹ scc/sec He
• Control valve leak integrity: <1.0% of Full Scale at 40 psig inlet-to-atmosphere
• D-Type connector (9-pin, 15-pin) or 20-pin card edge interface
• 15-pin Type "D" and card edge connectors are electronically compatible with other MKS flow controllers
– Typical Applications
Semiconductor processing, analytical instrumentation, gas delivery systems requiring precise flow control with integrated isolation.
– Compatibility & Integration
Swagelok® 1/4" fittings. TTL remote command compatibility enables integration into automated gas control systems.
