The OAI 306 is a handheld UV power meter engineered for direct reading of light intensity at the wafer plane in mask aligners, photolithography steppers, and UV curing systems. The instrument delivers auto-ranging measurements from 0.1 to 1999 mW/cm² with ±3% calibration accuracy (NIST traceable) and ±1% repeatability. Its LCD display, meter-to-meter matchability, and detachable probe architecture make it suitable for both single and dual wavelength applications across the UV and visible spectrum.
Technical Specifications
• Measurement Range: 0.1 to 1999 mW/cm² (auto-ranging, full scale)
• Measurement Units: mW/cm²
• Calibration Accuracy: ±3%, NIST traceable
• Measurement Repeatability: ±1%
• Linearity: ±1% across auto-ranging scale
• Available Wavelengths: 253.7 nm, 260 nm, 310 nm, 365 nm (I-Line), 380 nm, 400 nm, 420 nm, 436 nm, 540 nm
• Display: LCD (optimized for extended battery life)
• Power Source: Battery operated
– Key Features
• Auto-ranging capability for simplified field operation
• Meter-to-meter matchability ensures consistency across multiple units
• Detachable probes enable spectral response customization
• Single or dual wavelength probe configurations available
• Optional high-intensity, high-temperature probe for infrared-rich environments
• Peak hold switch option for transient intensity capture
• Optional analog output for data logging integration
– Typical Applications
• Mask aligner intensity verification
• Photolithography stepper characterization (365 nm I-Line probe)
• UV curing system process control
• General UV and visible light source intensity measurement
– Compatibility & Integration
The 306 accommodates both standard and specialized probe configurations, including visible-range measurement capability. High-temperature detachable probes address applications with significant infrared radiation. Optional peak hold and analog output functionality support both field measurement and automated monitoring workflows.
