The Recif Technologies 7MTM6 is a tabletop batch wafer transfer system engineered for 6-inch (150 mm) semiconductor wafers. It transfers wafers between SEMI standard cassettes using a slide mechanism, with operation in both automatic and manual modes. The self-returning transfer arm ensures readiness for manual operation, while a safety interlock prevents improper usage. Antistatic design and ESD protection safeguard wafers throughout the transfer process, making it suitable for cleanroom environments.
Technical Specifications
• Wafer Size: 6-inch (150 mm)
• Wafer Thickness: 15 to 23 mil
• Transfer Mechanism: Slide transfer for batch handling
• Cassette Compatibility: SEMI standard cassettes (PP, PFA, metal)
• Operation Modes: Automatic and manual
• Cleanroom Class: ISO 4 (FS209E Class 10)
– Key Features
• Transfer arm constructed from antistatic Polyoxymethylene (POM)
• Smooth slide motion for consistent wafer positioning
• Self-returning arm in manual mode
• Safety interlock system
• ESD protective measures for cassette and wafer protection
– Typical Applications
• Semiconductor fabrication batch operations
• Laboratory wafer processing
• Manufacturing environments requiring flexible operation modes
• Cleanroom-compatible wafer handling
– Compatibility & Integration
Accepts all SEMI standard cassette types—polypropylene, perfluoroalkoxy, and metal configurations. Designed for integration into benchtop laboratory and manufacturing setups where both automated and hands-on transfer operations are required.
