The Signatone S-400 (S465) is a manual probe station for semiconductor device characterization and failure analysis. It delivers stable, precision positioning across DC, CV/IV, RF, and high-power testing applications. The system accommodates wafers up to 300mm and features manual gear-drive stages with 1-micron resolution, a vacuum chuck, stereo zoom microscopy, and modular micropositioner options.
Technical Specifications
Sample Handling
• Vacuum chuck: 6.0 inch (152.40 mm) or 203mm (8″) diameter
• Wafer/die compatibility: up to 300mm
• Chuck isolation (10V DC): > 2 TΩ (guard to shield)
• Chuck operating voltage: −200V to +200V DC
• Maximum voltage (chuck top to GND): 500V DC
Stage Motion & Positioning
• X-Y manual gear-drive stage: 75 µm per degree of knob revolution
• X-Y positioning accuracy: ≈ 5 µm
• Fine-travel range: 12mm × 12mm with resolution < 1 µm (250 µm/rev)
• Theta rotation: 360° with lock
• Z-axis (platen lift): up to 9.5mm linear travel
• Platen fine adjustment: ≈ 5 µm accuracy
• Manual microscope stage: 50 × 50mm range, 1° = 2.54 µm resolution
Optics & Magnification
• Stereo zoom microscope (standard): 6.7:1 zoom, LED illumination, trinocular head, long working distance
• Optional upgrade: Nikon SMZ-1 with 10x eyepieces
• Available magnification: up to 100x on select models
Micropositioners
• Manual X, Y, Z movement available
• Models: S-926, S-931, S-725 (economic), S-M90 (manual RF microwave)
• Linear motion: 100 TPI with in-line micrometer knobs
Electrical & Connectivity
• Coaxial (BNC) and triaxial chuck connectivity
• RF operation: supports frequencies to 110 GHz and beyond with specified RF cables and connectors (e.g., 2.92mm)
– Key Features
• Gear-drive positioning with sub-micron fine-travel resolution
• 360° rotatable stage with integrated lock mechanism
• Optional hot chuck systems for thermal characterization
• Optional chuck roll-out stage for simplified wafer loading
• Modular accessory compatibility
– Typical Applications
• DC parametric testing
• CV/IV curve measurement
• RF and microwave device probing
• High-power device characterization
• Failure analysis and device debugging
– Compatibility & Integration
The S-400 accepts vacuum chuck sizes to 203mm and integrates with standard micropositioner platforms. RF operation extends into millimeter-wave bands with compatible connectors and cables. Hot chuck and environmental control accessories are available to expand thermal and environmental testing capabilities.
