The Tylan FC-260 is a mass flow controller engineered for precise measurement and control of oxygen in air at flow rates up to 750 SCCM. Operating at a maximum pressure of 150 PSIG, this solid-state valve assembly delivers ±0.8% of reading + 0.2% FS accuracy with ±0.2% FS repeatability and a 200:1 turndown ratio. The attitude-insensitive flow sensor and superior bypass design ensure consistent laminar flow performance regardless of mounting orientation. Control response time is 100 ms, with dual RS232 communications and 0 to 5 Vdc signal I/O standard. Optional 4 to 20 mA and 0 to 10 Vdc interfaces are available. Zero and span shift specifications are 0.02%/ATM FS/°C across an operating temperature range of -10 to 50°C. The unit maintains 1 × 10⁻⁹ atm cc/sec He leak integrity and operates in 0 to 100% RH non-condensing environments with 2.4% FS excess flow rate.
Technical Specifications
• Model: FC-260
• Flow Rate: 750 SCCM (oxygen in air)
• Maximum Pressure: 150 PSIG
• Accuracy: ±0.8% of reading + 0.2% FS
• Repeatability: ±0.2% FS
• Turndown Ratio: 200:1
• Control Response Time: 100 ms
• Excess Flow Rate: 2.4% FS
• Zero/Span Shift: 0.02%/ATM FS/°C
• Operating Temperature: -10 to 50°C (14 to 122°F)
• Humidity Range: 0 to 100% RH, non-condensing
• Leak Integrity: 1 × 10⁻⁹ atm cc/sec He
• Dimensions: 125.5 mm L × 136 mm H × 25.4 mm W
• Weight: 500 g
– Key Features
• Solid-state valve assembly with attitude-insensitive flow sensor
• Superior bypass design optimized for laminar flow conditions
• RS232 multi-drop capability up to 26 units on single connection (46 m maximum distance)
• Dual signal output: 0 to 5 Vdc and RS232 simultaneously
• Optional 4 to 20 mA and 0 to 10 Vdc I/O interfaces
• 24 Vdc universal power supply compatible
• Wetted materials: 303/302 SS, FKM, heat-cured silicone, RTV, glass-reinforced PPS, heat-cured epoxy, aluminum, gold, silicone, glass
– Typical Applications
• Semiconductor manufacturing and process gas metering
• Industrial oxygen-in-air flow control requiring critical accuracy
• Systems demanding high repeatability and pressure regulation to 150 PSIG
– Compatibility & Integration
Designed for clean gases with confirmed oxygen-in-air compatibility. RS232 communications enable remote setpoint adjustment and real-time data logging of volumetric flow, mass flow, absolute pressure, and temperature across networked installations.
