The Agilent/Keysight 10716A is a high-resolution plane mirror interferometer engineered for precision measurement in single-axis applications, particularly X-Y stage systems. It delivers twice the optical resolution of conventional plane mirror interferometers while maintaining thermal stability equivalent to the 10706B, achieving fundamental resolution of λ/8 (79.1 nm, 3.1 µin) with electronic extension capable of reaching λ/2048 (0.31 nm, 0.012 µin). The design minimizes measurement drift to approximately half that of standard plane mirror configurations.
Technical Specifications
• Optical Resolution: λ/8 fundamental (79.1 nm, 3.1 µin); λ/256 with 32× extension (2.5 nm, 0.1 µin); λ/2048 with 256× extension (0.31 nm, 0.012 µin)
• Thermal Drift Coefficient: 0.04 μm/°C (1.6 μin/°C) typical
• Non-linearity Error: ±1 nm (0.04 µin)
• Maximum Beam Size: 6 mm
• Beam Separation: 12.7 mm (0.5 in)
• Maximum Transmitted Beam Deviation: 30 minutes of arc
• Optical Surface Quality: 60–40 per Mil-0-13830
• Reflectance (measurement mirror): 98% at 633 nm, normal incidence
• Optical Efficiency: 98% (includes plane mirror reflector and reference mirror)
• Weight: 502 g (1.11 lbm)
– Key Features
• Measurement drift approximately half that of conventional plane mirror interferometers
• High optical efficiency with integrated 98% reflector and quarter-wave plate adapter
• Compact design accommodating 6 mm maximum beam size
• Option 001 available for applications requiring beam-turning configurations
• Included 10723A High Stability Adapter, retroreflectors, beam bender, and quarter-wave plate
– Typical Applications
• Precision X-Y stage measurement and calibration
• Laser-based dynamic calibration systems
• Mechanical parts inspection and dimensional measurement
• Mechanical vibration analysis
• Semiconductor fabrication and process monitoring
– Compatibility & Integration
Requires user-supplied measurement mirror (Keysight 10724A recommended). Mounts via 10711A standard mount. Operates with external electronic resolution extension modules supporting 32× and 256× magnification factors.
