The Agilent/Keysight 10721A is a two-axis differential interferometer for simultaneous monitoring of two axes of movement with exceptional accuracy and repeatability. It delivers multi-axis displacement measurements in advanced manufacturing, precision metrology, and scientific research environments. The instrument’s modular, compact design features monolithic optics that maximize mechanical stability and provide high immunity to thermal expansion and other unwanted interferometer displacement.
Technical Specifications
Measurement Capability
• Two differential linear measurements, two angular measurements, or simultaneous linear and angular (yaw) displacement
• Fundamental optical resolution: λ/4 (158.2 nm, 6.2 µin); 2.56 arcsec (12.4 µrad)
• System resolution with 32× electronic extension: λ/128 (5 nm, 0.2 µin); 0.08 arcsec (0.39 µrad)
• System resolution with 256× electronic extension: λ/1024 (0.62 nm, 0.024 µin); 0.01 arcsec (0.05 µrad)
Optical Characteristics
• Small 3 mm beam diameter minimizes Abbé offset error
• Includes shear plate, two retroreflectors, and two quarter-wave plates
• User supplies reference and measurement mirrors
• Weight: 300 g (10.6 oz)
– Key Features
• Two-axis differential measurement architecture for coordinated multi-axis monitoring
• Monolithic optics construction ensures mechanical stability and thermal immunity
• High sensitivity for precise measurement detection
• Modular design facilitates integration into complex metrology systems
– Typical Applications
• IC fabrication equipment wafer stage positioning referenced directly to optics column
• Precision manufacturing processes requiring multi-axis displacement tracking
• Quality control and advanced metrology in scientific research
– Compatibility & Integration
Designed for use with Keysight laser interferometer systems. Compatible with Keysight 5517C laser head when using Option 003 for 3 mm beam diameter operation.
