The Agilent/Keysight 10706B is a high-stability plane mirror interferometer for precision single-axis metrology. Operating as a dual-pass interferometer, it delivers exceptional thermal performance with a drift coefficient of 0.04 μm/°C—twelve times better than conventional plane mirror designs. The unit integrates a 10723A High Stability Adapter, retroreflector, and quarter wave plate for beam-bending capability through component interchange.
Technical Specifications
• Optical Resolution: λ/4 fundamental (158.2 nm or 6.2 µin); λ/128 with 32× electronic extension (5 nm or 0.2 µin); λ/1024 with 256× extension (0.62 nm or 0.024 µin)
• Maximum Beam Size: 6 mm
• Beam Separation: 12.7 mm (0.5 in)
• Thermal Drift: 0.04 μm/°C typical
• Weight: 323 g (11.4 oz)
• Mounting: 10711A
• Reflector Options: 10724A Plane Mirror Reflector or user-supplied
– Key Features
• Dual-pass measurement geometry
• High tolerance to angular misalignment of plane mirror reflector
• Configured for stationary mounting only—cannot function as moving measurement component
• Single-axis measurement capability
• Beam-bending accessory hardware included
• Exact functional replacement for 10706A with superior thermal stability
– Typical Applications
• Multi-axis stages (X-Y configurations) where measurement mirror moves perpendicular to measurement axis
• High-precision metrology demanding minimal thermal-induced measurement drift
• Applications requiring sub-nanometer resolution with extended electronic resolution
– Compatibility & Integration
The 10706B pairs with the 10724A Plane Mirror Reflector for single-axis measurements. For X-Y stage applications, users supply the measurement mirrors. The unit cannot operate in differential configuration. The 10716A offers twice the resolution for applications requiring enhanced precision.
