The Agilent/Keysight 5517GL is a stabilized Helium-Neon (HeNe) laser head engineered for high-precision metrology in laser interferometer systems handling faster motion velocities. Operating at 632.8 nm, it delivers coherent, collimated output for demanding distance and position measurement applications in semiconductor manufacturing and flat-panel display production.
Technical Specifications
• Laser Type: Helium-Neon (HeNe)
• Wavelength: 632.8 nm
• Output Power: 168 µW minimum (120 µW after 3 years); maximum 1 mW; higher power option available
• Wavelength Stability (1 hour, vacuum): 2 ppb
• Wavelength Stability (lifetime): 20 ppb
• Wavelength Accuracy (standard): ±0.1 ppm
• Wavelength Accuracy (optional calibration): ±0.02 ppm
• Reference Frequency: ≥7.2 MHz
• Beam Height: 80.8 ± 1.0 mm
• Beam Diameter: 9 mm (Option 009)
• Maximum Linear Velocity: 2.1 m/s (with linear optics); 2215 mm/s (with E1709A electronics/receivers)
• Warm-up Time: 45 minutes (fan and exhaust to vented cover); 90 minutes (fan to vent body)
• MTBF: >50,000 hours typical
• Input Power: +15 V ± 0.3 V at 2.2 A maximum; -15 V ± 0.3 V at 0.03 A maximum
• Weight: 3.2 kg
– Key Features
• Exceptional wavelength stability ensures measurement accuracy across extended operational periods
• Dual-calibration option delivers ±0.02 ppm accuracy for precision-critical metrology
• High-velocity capability supports advanced semiconductor lithography and flat-panel inspection systems
• Rapid stabilization reduces setup time in production environments
• Long MTBF rating minimizes unplanned downtime
– Typical Applications
• Semiconductor lithography systems requiring rapid stage motion
• Flat-panel display manufacturing and inspection
• High-speed laser interferometry
• VME and PC-based measurement automation
– Compatibility & Integration
The 5517GL integrates with VME and PC-based laser interferometer systems. Optimal performance at maximum velocity specifications requires the E1709A electronics package and compatible receivers. Power delivery demands a dedicated ±15 V supply; Agilent 10884B or equivalent is recommended.
