The Keysight M9603A is a PXIe Precision Source/Measure Unit (SMU) that delivers high-performance sourcing and measurement in a modular form factor. Built on PXIe Gen 3 x8 architecture, it combines precision voltage and current sourcing with simultaneous measurement capabilities, supporting both DC and dynamic pulsed operations. The module excels in characterizing optical devices like VCSELs and semiconductor components requiring exacting control and sub-picoampere resolution.
Technical Specifications
Electrical Performance
• Maximum voltage per output: 60 V
• Maximum DC current per output: 3.0 A
• Maximum pulsed current per output: 10.5 A
• Minimum current measurement resolution: 100 fA
• Minimum voltage measurement resolution: 6 μV
• Low-current noise floor: 400 fArms at 1 power line cycle aperture time
• Minimum pulse width: 10 μs
• Sampling rate: Up to 15 MSa/s
Measurement Architecture
• Triaxial output with guarding for low-current measurement stability
• 4-wire remote transient voltage measurement with dedicated high-bandwidth voltmeter
• Seamless current measurement ranging without range-change delays
• Integrated voltage and current limiting on sourced outputs
– Key Features
• Precision source/sink functionality with voltage and current sweep and pulse modes
• High-speed sampling captures dynamic behavior and transient response
• Sub-femtoampere measurement resolution enables characterization of leakage currents below 1 nA
• Narrow 10 μs pulse capability suppresses self-heating effects during dynamic measurements
• 4-wire sensing reduces cable inductance and voltage drop artifacts
• Modular PXIe form factor enables multi-module configurations within a single chassis
– Typical Applications
• VCSEL and laser diode characterization
• Semiconductor device parameter measurement
• Leakage and standby current analysis
• Pulsed device testing with transient capture
• Automated test systems requiring high-speed data throughput
– Compatibility & Integration
The M9603A integrates into PXIe chassis systems via the high-speed backplane. It connects to test fixtures through triaxial and 4-wire terminated outputs, supporting measurement configurations from simple two-wire to full guarded low-current setups.
