The Keithley 237 High Voltage Source-Measure Unit (SMU) is a programmable instrument that sources and measures voltage and current with high precision. It combines four distinct instrument functions—voltage source, current source, voltmeter, and ammeter—into a single unit, eliminating the need for multiple instruments and simplifying test setups. The 237 supports four-quadrant operation and delivers measurement sensitivity down to 10 fA and 10 µV, making it ideal for characterizing semiconductors, evaluating materials, and testing precision devices.
Technical Specifications
Sourcing
• Voltage: 100 µV to 1100 V
• Current: 100 fA to 100 mA (limited to 10 mA maximum at 1100 V)
• Output Resistance: >10¹⁴Ω paralleled by 10¹⁴Ω || 10²²Ω || <20 pF
• Voltage Burden (Ammeter): <1 mV
Performance
• Settling Time: <500 µs to 0.01% for 110 V step on 10 mA range
• Overshoot: <0.01% typical
• Noise (0.1–10 Hz): <3 ppm typical (60 dB at 50/60 Hz with LINE CYCLE integration
• CMRR: >120 dB at DC and 50/60 Hz with LINE CYCLE integration
• Reading Speed: 110 Readings/s
• Source/Measurement Speed: 1000 source/measurements per second
Compliance
• Current Limit: ±0.1% to ±100 mA of range (±10 mA on 1100 V range)
• Voltage Limit: ±0.1% to ±1100 V of range (±110 V on 100 mA range)
– Key Features
• Four-quadrant sourcing capability
• Linear, logarithmic, and pulsed sweep modes
• Accuracy to ±(0.025% + 1 mV) on 1 mV range
• High input impedance minimizes loading effects
• Fast settling and low overshoot
– Typical Applications
Semiconductor characterization, device parameter extraction, materials testing, and precision current/voltage measurements in research and production environments.
