The Melles Griot NanoMax-TS 17MAX303 is a high-precision XYZ 3-axis stage engineered for motion control applications demanding sub-micrometer accuracy and repeatability. Built on a patented parallel-flexure design, the stage delivers stable, repeatable linear motion across X, Y, and Z axes with nanometer-level resolution. DRV001 stepper motors provide controlled positioning, while software-based lead screw error compensation—using 1-nm resolution laser interferometer calibration data—achieves accuracies comparable to encoder-equipped systems. The stage serves research, microscopy, laser alignment, semiconductor manufacturing, and photonics workflows.
Technical Specifications
Stage Architecture
• Type: XYZ 3-axis linear stage
• Mechanism: Patented parallel-flexure design
• Drive system: DRV001 stepper motors with full microstep control
• Motor driver current output: 1 A (via 17MST001 stepper motor control module)
Positioning Performance
• Resolution: Nanometer-level achievable with appropriate control and calibration
• Repeatability: Nanometer-range RMS (typically ~15 nm for comparable models)
• Accuracy: Enhanced through software-based automatic lead screw error compensation using multipoint calibration tables derived from 1-nm resolution laser interferometer data
• Stability: Flexure design minimizes drift
Construction
• Stage body: Rigid materials suitable for high-precision applications, typically aluminum alloy with anodized finishes for durability
– Key Features
• Microstep control enables fine-resolution positioning
• Automatic lead screw error compensation eliminates repeatable positioning errors
• Calibration data stored in multipoint tables for consistent accuracy
• Modular architecture integrates into larger automated systems
– Typical Applications
• Advanced microscopy and imaging systems
• Laser alignment and beam steering
• Semiconductor manufacturing and photolithography
• Photonics research and development
– Compatibility & Integration
• Compatible with Thorlabs APT controllers and DRV001 stepper motor drivers
• Pairs with Melles Griot 17MST001 stepper motor control module for full microstep and backlash compensation functionality
• Integrates into modular controller racks with Controller Area Network (CAN) connectivity
• Requires separately specified mounting plates (e.g., 17AMA555 or Thorlabs MMP1)
