The Millipore / Tylan FC261 4V is a thermal differential mass flow controller engineered for precise, repeatable gas flow regulation in semiconductor manufacturing, analytical instrumentation, and chemical research environments. This FC260/FM360 series device delivers stable gas delivery independent of pressure and temperature fluctuations, making it suitable for applications demanding high measurement accuracy and fast response characteristics.
Technical Specifications
• Manufacturer: Millipore / Tylan
• Product Family: FC260/FM360 Series
• Flow Measurement Principle: Thermal differential flow sensor
• Repeatability: Independent of pressure and temperature changes
• Valve Type: Normally-closed solenoid valve
• Wetted Materials: 316L stainless steel and 446 stainless steel; elastomer options include Viton® and Kalrez®
– Key Features
• Thermal differential sensor design eliminates need for pressure or temperature corrections
• Superior bypass design with laminar flow characteristics
• Attitude-insensitive mounting capability
• Normally-closed solenoid valve architecture for fail-safe operation
– Typical Applications
• Semiconductor manufacturing gas delivery
• Analytical instrumentation systems
• Chemical research and process control
• Industrial gas flow regulation requiring stable, repeatable control
– Compatibility & Integration
The FC261 4V integrates into existing process systems requiring precise thermal mass flow measurement and control. Component construction using 316L and 446 stainless steel ensures compatibility with corrosive gas environments, while elastomer selections support diverse gas chemistry requirements. This model remains available through qualified third-party suppliers despite original manufacturer EOL status.
