The MKS Instruments 1179A22CR1BV is a precision Mass Flow Controller engineered for accurate measurement and control of gas mass flow rates across diverse industrial and research applications. Built on MKS’s patented laminar flow sensor design with a parallel bypass element, this elastomer-sealed unit delivers fast, repeatable flow control from 0.2 sccm minimum controllable flow up to 20 slm full scale. The normally-closed control valve architecture ensures reliable performance in high-cleanliness environments. With its standard 3-inch footprint, electrical connectors, and pin-outs matched to industry counterparts, the 1179A22CR1BV integrates directly into existing systems without gas line or cable modifications. The unit can also function as a pressure controller when paired with an appropriate pressure transducer.
Technical Specifications
• Flow Ranges: 10 sccm to 20 slm (20,000 sccm) full scale; 0.2 sccm minimum controllable
• Accuracy (Analog): ±1.0% of Full Scale (includes non-linearity, hysteresis, and non-repeatability, referenced to 760 mmHg and 0°C)
• Repeatability: <0.05% of Full Scale/°C
• Resolution: <0.08% of Reading/°C
• Zero Temperature Coefficient: <0.05% of Full Scale/°C
• Span Temperature Coefficient: <0.08% of Reading/°C
• Warm-up Time: <2 minutes (to within 0.2% of Full Scale of steady-state performance)
• Settling Time: <2 seconds (per SEMI Guideline E17-91)
• Maximum Inlet Pressure: 150 psig
• Operating Pressure Differential: 10–40 psid (with atmospheric outlet)
• Proof Pressure: 500 psig
• Burst Pressure: 1500 psig
• External Leak Integrity: <1 × 10⁻⁹ sccm/s
• Closed Valve Leak Integrity: <1.0% of Full Scale at 40 psig inlet to atmosphere
• Wetted Materials: 316L stainless steel, Viton, nickel
• Surface Finish: 316L stainless steel <32 µin Ra
– Key Features
• Viton elastomer seals for compatibility across standard gas applications
• Patented bypass sensor architecture for thermal stability and repeatability
• 0–5 VDC signal input/output with 15-pin D-sub connector
• Digital communication via RS-485 and DeviceNet on select models
• RF/EMI immunity through metal cover and RF bypass capacitor design
• Direct replacement form-fit-function for legacy MFC installations
– Typical Applications
Process gas delivery in semiconductor fabrication, research laboratories, analytical instrumentation, and industrial gas metering systems requiring high-purity flow control and minimal external leakage.
– Compatibility & Integration
Set point command accepts 0–5 VDC from <20 kΩ source impedance. Analog I/O via standard 15-pin D-sub connector. Digital variants support RS-485 and DeviceNet communication protocols for networked process control environments.
