The MKS Instruments 1179A52CS1BV is a mass flow controller delivering precise gas flow measurement and control across a wide range of applications. Part of the 1179A Mass-Flo® Controller series, this instrument combines a laminar flow device with bypass element and sensor tube technology to achieve accurate mass flow indication using MKS proprietary measurement techniques. Elastomer sealing and 316L stainless steel wetted materials ensure performance in clean environments, while metal shielding and RF bypass capacitors effectively eliminate RFI and EMI interference.
Technical Specifications
• Full Scale Flow Range: 10 to 30,000 sccm (N₂ equivalent); 500 sccm O₂ available for specific variants
• Control Range: 2% to 100% of Full Scale
• Accuracy: ±1.0% of Full Scale (includes non-linearity, hysteresis, non-repeatability) at 760 mmHg, 0°C
• Repeatability: ±0.2% of Full Scale
• Resolution: 0.1% of Full Scale
• Zero Temperature Coefficient: <0.05% of Full Scale/°C
• Span Temperature Coefficient: <0.08% of Reading/°C
• Pressure Coefficient: <0.02% of Reading/psi
• Warm-up Time: <2 minutes to 0.2% steady-state performance
• Settling Time: <2 seconds
– Key Features
• Power Requirements: ±15 VDC; 200 mA startup, 100 mA steady-state
• Set Point Command: 0 to 5 VDC from <20 kΩ source impedance
• Flow Output Signal: 0 to 5 VDC
• Connector Options: 9-pin or 15-pin Type D (15-pin electronically compatible with MKS flow controllers)
• Remote Valve Control: TTL-level commands for valve open/close operation
• Compact Footprint: 3-inch form factor fits existing installations without gas line modification
• Wetted Materials: 316L Stainless Steel, Viton®, Nickel
– Typical Applications
General-purpose gas flow control in research, process manufacturing, and laboratory environments where repeatable, accurate mass flow measurement is critical.
– Compatibility & Integration
The 15-pin Type D connector provides direct electrical compatibility with other MKS flow controllers, simplifying multi-instrument control architectures.
