The MKS Instruments PCA-28226 is an integrated pressure controller combining a Baratron capacitance manometer, proportional control valve, and closed-loop electronics into a single compact unit. It delivers highly accurate, gas-composition-insensitive pressure measurement with rapid digital control response, eliminating the need for separate sensor and valve assemblies. Configuration, tuning, and real-time diagnostics occur via Ethernet using any standard web browser. A bright, rotatable 4-digit LED display shows process pressure, full scale, temperature, and network IP address. Available in upstream and downstream configurations, the PCA-28226 manages chamber backpressure or gas delivery pressure across full scale ranges from 1000 torr to 100 psia, offering percent-of-reading accuracy that outperforms strain gauge alternatives at lower pressures and wider dynamic ranges.
Technical Specifications
• Pressure Measurement: Baratron capacitance manometer technology—gas-composition-independent
• Full Scale Pressure Range: 1000 torr to 100 psia
• Accuracy: Percent of reading with superior stability and resolution versus strain gauge transducers
• Control Loop: Digital architecture with rapid setpoint response
• Control Configurations: Upstream or downstream pressure control
• Integrated Components: Manometer, proportional valve (normally closed or normally open), closed-loop control electronics
– Key Features
• Single integrated package reduces bill of materials and system footprint
• Ethernet interface with web-browser configuration eliminates dedicated software dependencies
• Rotatable LED readout for flexible panel mounting
• DeviceNet, RS-485, or analog I/O communication options
• Direct pressure measurement insensitive to process gas type or mixture
– Typical Applications
• Semiconductor process chambers requiring backpressure regulation
• Gas delivery pressure management in advanced manufacturing
• Process cycles demanding minimal pressure control settling time
– Compatibility & Integration
The PCA-28226 interfaces via Ethernet for setup and monitoring, with digital I/O through DeviceNet or RS-485 and analog I/O available. Power requirements are 24 VDC at 5A for core operation and 12A for I/O modules when used with MKS Power Supply Modules on the Automation Platform.
