The Stanford Research Systems RGA200 is a residual gas analyzer that delivers precise compositional analysis across mass range 1–200 amu within vacuum systems. It combines a six-order dynamic range in single-scan operation with detection limits down to 5 × 10⁻¹⁴ Torr (electron multiplier), making it suitable for leak detection, vacuum monitoring, and process gas analysis in laboratory and industrial environments. The analyzer features an open ion source with cylindrical symmetry, electron impact ionization, and integrated electron impact desorption for ion source degassing. A field-replaceable electron multiplier option enables enhanced sensitivity and faster acquisition when needed.
Technical Specifications
Mass Range & Resolution
• Mass range: 1–200 amu
• Resolution: Better than 1 amu at 10% peak height; adjustable for constant peak width across full range
• Dynamic range: 6 orders of magnitude per single scan
Detection & Sensitivity
• Faraday cup (standard): 5 × 10⁻¹¹ Torr detection limit; 2 × 10⁻⁴ A/Torr sensitivity
• Electron multiplier (optional, field-replaceable): 5 × 10⁻¹⁴ Torr detection limit; <200 A/Torr sensitivity
Ionization & Electron Parameters
• Ionizer: Open source, cylindrical symmetry, electron impact ionization
• Electron emission current: 1 mA (measured)
• Electron energy: 70 eV (measured)
• Ion energy: 12 eV (measured)
– Key Features
Probe Assembly
• Standard 2.75" Conflat flange mounting
• Stainless steel tube enclosure with self-aligning parts for post-cleaning reassembly
• Dimensions: 8.75" from flange face to ionizer top; 2.0" insertion depth; requires 2.5" internal vacuum clearance
• Minimized outgassing via simple, low-component design
Electronics Control Unit
• Dimensions: 9.1" W × 4.1" H × 3.1" D
• Separable from probe head for independent high-temperature bake-out
• Power: 24 VDC at 2.5 A (optional AC line power module available)
• LED status indicators: Power, filament, degas, electron multiplier, RS-232 busy, error, overpressure, burnt filament
Software & Control
• Real-time Windows software for data acquisition, analysis, and probe control
• User-selectable display units: Torr, mbar, Pa, A
• Programmable audio and visual alarms
– Typical Applications
• Leak detection in vacuum systems
• Residual gas composition monitoring
• Process gas analysis and chamber diagnostics
• Vacuum system commissioning and maintenance
– Compatibility & Integration
The RGA200 integrates with standard 2.75" Conflat-flanged vacuum systems and operates via 24 VDC or optional AC-powered electronics. Remote control and data logging are enabled through RS-232 interface.
