The Stanford Research Systems UGA300 is a benchtop quadrupole mass spectrometer for real-time gas mixture analysis across atmospheric pressure to ultra-high vacuum environments. Operating with a mass range up to 300 amu and response time under 0.2 seconds, the UGA300 delivers ppm-level detection sensitivity and 0.5 amu resolution. The instrument combines a two-stage pressure-reducing inlet system with electron multiplier detection and integrated bakeout capability to 120 °C, supporting applications from semiconductor exhaust monitoring and fuel cell analysis to glove box characterization and general vacuum diagnostics. Front-panel and computer-controlled operation via RS-232 or Ethernet connectivity enables flexible deployment in research, industrial, and highly corrosive environments.
Technical Specifications
• Mass range: Up to 300 amu
• Operating pressure: Atmospheric to ultra-high vacuum (UHV)
• Response time: < 0.2 seconds
• Detection limit: < 1 ppm
• Resolution: Better than 0.5 amu at 10% peak height
• Detector: Electron multiplier (standard)
• Pressure sampling modes:
– Capillary inlet: 1–10 mL/min at atmospheric pressure
– Vacuum inlet assembly: 10⁻¹ to 10⁻⁴ Torr
– Direct RGA access: < 10⁻⁴ Torr (UHV)
• Built-in heaters: Bakeout to 120 °C
• Power input: 85–264 VAC or 120–370 VDC, 47–63 Hz or DC
• Power consumption: 720 W
• Internal voltage: 24 VDC
• Dimensions (W×H×L): 12" × 27" × 11"
• Weight: 85 lbs
– Key Features
• Two-stage pressure-reducing inlet with capillary (standard) and multi-capillary (optional) configurations
• Leak detection capability as standalone mode
• Windows software with graphical interface, complex graphing, remote valve/heater/pump control, and analog/histogram scan modes
• High-level ASCII command set for remote probe parameter control
• Operation in highly corrosive environments
• Forced-air cooling requirement
– Typical Applications
• Semiconductor exhaust gas monitoring
• Fuel cell studies
• Glove box analysis
• Vacuum system diagnostics
• Industrial gas mixture characterization
– Compatibility & Integration
• Computer interfaces: RS-232 and Ethernet
• Optional turbo pump venting valve (nitrogen or inert gas compatible)
• Optional multi-capillary inlet
• UGA-Hydrogen option: Measurement capability to 100% H₂
