The Tylan FC-260 Mass Flow Controller delivers precise, automated control of gas flow rates for semiconductor manufacturing and industrial research applications. This 200 SCCM O₂-in-air configured unit measures and regulates flow without external pressure or temperature compensation, maintaining ±1% full-scale accuracy across its operating range. The solid-state valve assembly operates under laminar flow conditions, ensuring long-term repeatability of ±0.5% FS with typical response time of 6 seconds. Sealed construction achieves < 1 × 10⁻⁹ atm cc/sec He leak integrity. The FC-260 mounts in any orientation without zero adjustment and operates from 5 to 43°C.
Technical Specifications
• Flow Rate: 200 SCCM O₂ in air (alternative configurations: 3 SLPM air, 5 SLPM O₂)
• Maximum Pressure: 150 PSIG (10.35 bar max; 2.08 bar optimal)
• Accuracy: ±1% full scale
• Linearity: ±2% full scale
• Repeatability: ±0.5% full scale
• Response Time: Typically 6 seconds
• Leak Integrity: < 1 × 10⁻⁹ atm cc/sec He
• Operating Temperature: 5 to 43°C (40 to 110°F)
• Electrical Output: 0–5 VDC (5 V = FS); 4–20 mA optional
• Control Signal Input: −5 VDC (2.5 kΩ max source impedance)
• Input/Output Impedance: 2000 Ω
• Power: +15 VDC @ 25 mA max; −15 VDC @ 180 mA max (4.0 W total)
• Dimensions: 125.5 mm × 136 mm × 25.4 mm
• Weight: 500 gm
• Construction: Type 316 Stainless Steel (primary)
– Key Features
• Orientation-insensitive design—no zero adjustment required
• Solid-state valve assembly with superior bypass design
• Negligible dead volume
• Gas-universal operation with known conversion factors
• Selectable seal materials: 316 SS, Viton®, Kalrez®, Neoprene
– Typical Applications
• Semiconductor process gas delivery and automation
• Industrial and research environments requiring automated flow control
• Processes demanding precise oxygen or air delivery
– Compatibility & Integration
The FC-260 accepts analogue control signals and outputs linear 0–5 VDC or optional 4–20 mA for integration with process control systems. Gas compatibility extends to any gas with established conversion factors.
