The Advanced Energy MDX-2.5K is a 2.5 kW DC sputtering power supply engineered for demanding vacuum-chamber applications in semiconductor manufacturing and research environments. It delivers precise, stable output across three regulation modes—power, current, and voltage—with 0.25% accuracy in all modes. High-frequency conversion architecture enables >90% efficiency and exceptionally low output stored energy, yielding sub-20 ms response to plasma load transients and minimal line-induced surge effects.
Technical Specifications
• Power Output: 2.5 kW maximum
• Output Voltage: 500 V to 1800 V
• Strike Voltage: Up to 1800 V
• Regulation Modes: Power, current, voltage at 0.25% accuracy
• Ripple: 1% RMS at 100 kHz
• Response Time: 20 ms to plasma load changes
• Efficiency: >90% line to load
– Key Features
• ARC-OUT™ multilevel arc suppression with impedance-based sensing and power cutoff reduces target burn-in and material loss
• Three independent regulation modes ensure stable operation across varied process demands
• Input options: 1-phase 200-208 VAC (21 A fuse) or 1-phase 220-240 VAC (19 A fuse), 50/60 Hz
• Power factor: 0.6
• Forced-air cooling; maximum ambient 45°C with free airflow required
• Operating range: 0–40°C ambient (35°C max 24-hour average); 0–35°C coolant temperature
• Minimum atmospheric pressure: 800 mbar (2000 m elevation)
• Humidity: 92% noncondensing
– Typical Applications
• DC magnetron sputtering in thin-film deposition
• High-power substrate bias supplies in hard-coat systems
• RF sputter and etch system bias drives
• Continuous duty in vacuum environments
– Compatibility & Integration
Control interfaces include front panel, user port, and RS-232 ASCII port. Output connectors are UHF or 6-32 terminal block. Unit dimensions are 25″ × 19″ × 7″ and weighs 73 lbs (33.11 kg). Chassis grounding must be maintained; ground connection defeat is not permitted.
