The Advanced Energy MDX-5K is a 5 kW DC magnetron power supply engineered for thin film deposition and precision coating applications requiring stable, regulated power delivery. It delivers 0 to 1000 V output with 0 to 10 A current capability, maintaining 0.25% regulation across power, voltage, and current modes. The supply incorporates proprietary Arc-Out™ circuitry that senses and quenches arcs in real time, minimizing target damage and process contamination while maintaining continuous operation into any load mismatch. Output ripple is held to 5% rms at 50 kHz with low stored output energy that limits energy discharge during arc events.
Technical Specifications
• Output: 5 kW, 0–1000 V, 0–10 A
• Regulation: 0.25% in power, voltage, and current modes
• Output Ripple: 5% rms at 50 kHz
• Ignition Voltage: 1550 V
• Striking Voltage: 1500 V (standard Z version); 800 V (low Z units)
• Efficiency: >90% line-to-load
• Input: 208–415 V ±10%, 3 phase, 50/60 Hz; 17 A nominal (MDX-5K)
• Power Factor: 0.92
• Dimensions: 88.63 mm (H) × 215.9 mm (W) × 406.4 mm (D)
• Weight: 11 kg
• Operating Temperature: 0–40 °C
• Storage Temperature: −25 to +55 °C
• Humidity: 0–92% non-condensing
– Key Features
• Arc-Out™ active arc detection and quenching reduces splatter and substrate damage
• Three selectable regulation modes (power, current, voltage) with no output shutdown required
• Programmable ramp and run timers (0–99 minutes)
• Low output energy storage minimizes arc energy release
• Forced air cooling with maximum ambient temperature of 45 °C
• UHF-type output connector with RG-8U coaxial cable
– Control & Integration
• Front panel control with setpoint lock
• RS-232 ASCII-coded remote interface
• Analog/digital user port for system integration
• Full voltage and current digital readback
• User I/O for interlocks and output status monitoring
– Typical Applications
DC magnetron sputtering for physical vapor deposition, thin film coatings, and industrial coating systems.
