The Advanced Energy MDX 3152224-000P is a DC magnetron drive engineered for reliable power conversion in vacuum sputtering environments. This power supply delivers stable output through high-frequency switching techniques that minimize energy storage, reduce splatter, and accelerate response to magnetron load changes. Arc-Out™ technology provides arc, open-circuit, and short-circuit protection by sensing abnormal loads and quenching arcs before damage occurs.
Technical Specifications
Power Output: 1 kW (Standard Z configuration) or 1.5 kW (Low Z configuration)
Input Voltage: 180–240 VAC, 50/60 Hz, three-phase with neutral; 208 VAC ± 10%; or 115 VAC ± 10%
Output Voltage: 500V to 1000V DC with 3-tap configuration. Standard Z: 1500V striking, 1000V output. Low Z: 800V striking, 500V output.
Output Current: 1A (1 kW, 1000V) or 3A (1.5 kW, 500V)
Regulation: Power, Current, and Voltage modes with 0.25% accuracy across all modes
Ripple: 5% RMS at 50 kHz (5 kW) or 1% RMS at 100 kHz (units > 5 kW)
Response Time: 20 msec to plasma load changes
Efficiency: Over 90% line-to-load
Stored Energy: Extremely low output energy
– Key Features
• Arc-Out™ proprietary arc suppression circuit
• Front panel control with digital meters and setpoint lock
• Remote interfaces: analog/digital user port and RS-232 ASCII
• Analog control of ramp and output; logic or contact ON/OFF control
• Fully buffered, ground-referenced signals
• 0–5V control signals for voltage, current, and power
– Typical Applications
• DC magnetron sputtering systems
• RF sputtering and etching systems (as bias supplies)
• High-rate deposition of hard-to-deposit materials
• Continuous operation in laboratory and industrial vacuum environments
– Compatibility & Integration
Front panel operation and remote control via user port (analog/digital) or RS-232 ASCII interface support both manual and automated process integration.
