The Keysight 10766A is a single-axis linear interferometer for high-precision displacement measurements in positioning, calibration, and alignment applications. Optically identical to the 10702A option 001, it features a rugged stainless steel housing with metric threads engineered for demanding environments and repeated installations. The instrument delivers fundamental optical resolution of λ/2 (316.5 nm, 12.5 µin) and supports electronic resolution extension to λ/64 (10 nm, 0.4 µin) or λ/512 (1.2 nm, 0.047 µin).
Technical Specifications
• Beam size: 6 mm (0.24 in)
• Beam separation: 11 mm (0.43 in)
• Fundamental optical resolution: λ/2 (316.5 nm, 12.5 µin)
• System resolution with 32x extension: λ/64 (10 nm, 0.4 µin)
• System resolution with 256x extension: λ/512 (1.2 nm, 0.047 µin)
• Weight: 312 g (11 oz)
– Key Features
• Thermally stable stainless steel construction with metric threads
• Single-axis measurement capability with optional differential operation
• Instrument-as-moving-component capability for unique measurement geometries
• Beam-bending operation supported
• Compact form factor: 6 mm beam diameter, 11 mm beam separation
– Typical Applications
• High-accuracy positioning and displacement measurement
• Precision calibration and alignment tasks
• Scientific and industrial measurement applications
• Differential measurements when paired with reference reflector
– Compatibility & Integration
The 10766A integrates with Keysight/Agilent laser interferometer systems. Required components include the 10767A Linear Reflector and 10785A mount. A second 10767A or 10703A reflector is required to complete the linear measurement optic set. The 55280B Linear Measurement Kit provides all optics and mounting hardware.
