The Keysight E1715A is a 3-axis compact interferometer designed for precision laser metrology applications requiring exceptional pointing stability and minimal nonlinearity error. Built on monolithic optics architecture, it delivers λ/4 optical resolution with ±0.5 nm nonlinearity error across all measurement axes. The instrument integrates remote sensors via ST connectors, eliminating separate sensor mounting complexity while supporting plastic or glass optical fibers in multiple lengths.
Technical Specifications
Optical Performance
• Beam diameter: Φ4 mm maximum (visible)
• Optical resolution: λ/4 with plane mirror
• Nonlinearity error: ±0.5 nm
• Output efficiency: 18% typical, 12% worst case (all axes)
• Measure point tolerance (absolute): ±0.5 mm
• Beam parallelism: <25 μrad (Axis #1 to Axis #2 and Axis #1 to Axis #3)
• Fiber output coupling: 400-micron fiber, NA 0.39
Input Beam Specifications
• Straight-through configuration: <1 mrad cone angle
• With input bending mirror option: <10 mrad cone angle
Environmental & Mechanical
• Operating temperature: 18°C to 26°C
• Thermal drift: 92% reflectivity, λ/20 flatness
– Typical Applications
Precision displacement and positioning measurement in laser-based metrology systems where low nonlinearity and stable beam pointing are critical.
– Compatibility & Integration
Mounts via four M4 × 0.7 mm captive socket head screws. Requires customer frame with 0.02 mm surface profile and 0.40 μm surface finish.
