The Keysight E5270B is an 8-slot precision measurement mainframe engineered for high-speed DC parametric characterization of semiconductor devices and materials. It delivers current-voltage (IV) measurements across an exceptional dynamic range with configurable plug-in modules that support manual operation and fully automated test sequences. The modular architecture accommodates up to eight single-slot or four dual-slot modules, enabling custom instrument configuration tailored to specific device requirements.
Technical Specifications
Measurement Capabilities
• Voltage range: 0.5 µV to 200 V
• Current range: 0.1 fA to 1 A
• Resolution: 0.5 µV and 10 fA with specific modules; 0.1 fA with ASU and HRSMU
• Pulse width: 500 µs to 2 s (100 µs resolution)
• Pulse period: 5 ms to 5 s
• Measurement modes: spot, pulsed spot, quasi-pulsed spot, staircase sweep, multi-channel sweep, pulsed sweep, staircase with pulsed bias, linear search, and binary search
Source and Measurement Units
• Configurable SMU modules: High Resolution SMU (HRSMU), Medium Power SMU (MPSMU), High Power SMU (HPSMU)
• Maximum source current: 1 A
• Maximum source voltage: 200 V
• Ground Unit (GNDU): forces 0 V, sinks up to 4 A
• Voltage and current compliance for device protection
• Module power budget: 80 W maximum
Hardware Integration
• 8-slot mainframe for flexible module configuration
• High-resolution and high-speed ADCs available to all modules
• Triaxial (Kelvin) output connectors for precision sensing
• BNC trigger-in and trigger-out connectors
• 16 general-purpose digital I/O lines
• Program memory available
Interfaces
• GPIB control port
• FLEX command set support
• LAN interface for remote test execution
– Key Features
• Modular design supports single and dual-slot configurations
• Dynamic range from attoamperes to amperes, microvolts to 200 V
• Pulse measurement capability with 100 µs resolution
• Compliance limiting protects devices under test
– Typical Applications
• Semiconductor parameter testing and device characterization
• Material property measurement and analysis
• Device leakage current and breakdown voltage assessment
• Multi-terminal device evaluation via multi-channel sweeps
– Compatibility & Integration
The E5270B integrates with Keysight EasyEXPERT group+ software, providing a GUI-based platform for measurement setup, execution, data analysis, and management. GPIB and LAN connectivity enable both interactive operation and remote automated test execution.
