The Keysight M9614A is a five-channel precision Source/Measure Unit (SMU) in a single PXIe slot, delivering high-density performance for semiconductor reliability and IC testing. Each channel sources and measures DC and pulsed signals with 30 V maximum output and 500 mA maximum current. Current measurement resolution reaches 100 pA; voltage resolution, 6 μV. The module features seamless auto-ranging across four measurement ranges without manual intervention, capturing dynamic behavior from picoamp to sub-amp levels. Pulse capabilities include 100 μs minimum width with 0.5% ± 2 μs accuracy, plus 500 kSa/s sampling for transient characterization.
Technical Specifications
• Form Factor: Single-slot PXIe module
• Channels: 5 per module
• Maximum Voltage Output: 30 V per channel
• Maximum Current Output: 500 mA per channel
• Current Measurement Resolution: 100 pA (M9614A)
• Voltage Measurement Resolution: 6 μV
• Maximum Sample Rate: 500 kSa/s
• Minimum Pulse Width: 100 μs
• Pulse Width Accuracy: 0.5% ± 2 μs
• Pulse Period Accuracy: 0.5% ± 4 μs
• Voltage Source Noise: 25 μVrms (6 V range); 110 μVrms (30 V range)
• Low Noise Filter Option: 25 μVrms (10 Hz – 20 MHz, with PX0107A adapter)
• Connector: D-sub 25-pin with HF, LF, HS, LS, and G terminals per channel
• Measurement Modes: Two-wire and four-wire configurations
• Module Width: 19.5 mm
– Key Features
• Seamless current measurement auto-ranging eliminates manual range switching
• Four-wire measurement support enables high-accuracy voltage sensing
• Guard terminal for ultra-low current applications
• External trigger and interlock terminals for system synchronization
• Low voltage source noise option with dedicated filter adapter
– Typical Applications
• Semiconductor device characterization and reliability testing
• Integrated circuit parametric test
• Pulsed and transient measurements
• Multi-device parallel testing in high-density environments
– Compatibility & Integration
Operate within PXIe chassis supporting minimum 6 A on the 12 V rail. Compatible with Keysight M9018B and M9019A chassis.
